Simulation of Trap-Induced Noise Characteristics in 3-Nm Complementary FET

Jinghan Xu,Zheng Zhou,Fei Liu,Xiaoyan Liu
DOI: https://doi.org/10.1109/snw63608.2024.10639219
2024-01-01
Abstract:This study investigates trap-induced noise characteristics in a 3-nm node complementary FET transistor (CFET) through TCAD simulations and theoretical calculations. A noise power spectral density (PSD) model tailored for the 3D gate-all-around structure is developed. Through theoretical calculations, the dependence of noise PSD on trap profiles and bias conditions is investigated.
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