HOLOGRAPHIC INTERFEROMETRY FOR VISUALIZATION OF VIBRATIONS OF MICROMECHANICAL STRUCTURES

R. Vasiliauskas,Ramutis Palevičius,Minvydas Ragulskis,Arvydas Palevičius,Giedrius Janušas
DOI: https://doi.org/10.5755/j01.itc.32.3.11860
2004-01-01
Abstract:The optical holography and digital holography methods for visualization of modes of vibrations of mic- romechanical systems are described. The Denisiuk holography approach and optoelectronic techniques for investi- gation MEMS with sub-micrometer accuracy, shape and changes in states of deformation of MEMS structures are proposed. Examples of holographic visualization of the vibration of links of MEMS are presented.
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