Studies of dynamic properties of MEMS and NEMS using a three dimensional nano-imager

Jinpeng Bai,Sheng Liu,Ronald F. Gibson,Tielin Shi

2006-01-01

Abstract:Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) have mechanical properties that can be quite different from those of their macromechanical counterparts, so it is necessary to develop measurement systems to accurately characterize these properties. Due to the tiny dimensions of these systems, optical methods are appropriate methods used for characterization. In this paper, one characterization system and its application are introduced. This measurement system is based on phase shifting interferometry, microvision and stroboscopic illumination, so both in-plane and out-of-plane nanometer resolution motion parameters such as in-plane velocity and three dimensional profiles can be extracted from image sequences and interferograms. The modal parameters such as resonant frequency can be acquired through these parameters. Because modal parameters determine the dynamic performance of micro and nano devices, the measurement results can verify and improve the original designs.