In-Plane Motion Measurement Based On Phase Correlation And Block Matching With Nano-Ressolution For Mems/Nems

Cy Jin,Dc Li,X Fu,Sj Jin,Yl Feng,Xt Hu
2005-01-01
Abstract:In order to measure motion characteristics and dynamic parameters of MEMS/NEMS in every moment optical measurement method is used according to MEMS/NEMS device features. Motion detection technique based on phase correlation and block matching is put forward to analyze MEMS/NEMS motion image series. And MEMS/NEMS motion characteristics are got. The results give important reference to MEMSINEMS design. Experimental results indicate that the method has good measurement precision and measurement velocity, the measurement repeatability is 44nm.
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