IMAGING GIGAHERTZ DYNAMICS IN MICROMECHANICAL RESONATORS USING ULTRAFAST PULSED LASER INTERFEROMETRY

L. Shao,V.J. Gokhale,J.C. Kuo,A. Lal,J.J. Gorman
DOI: https://doi.org/10.31438/trf.hh2018.106
2018-01-01
Abstract:Optical measurements of resonant MEMS can provide direct insight into their dynamics and guide improvements in device performance.This paper presents an optical method based on pulsed laser interferometry that can measure vibrations of MEMS resonators under coherent RF excitation with sub-picometer resolution and at arbitrary frequencies potentially well beyond 10 GHz.Vibration amplitude and phase can be measured across the entire resonator, thereby enabling experimental modal analysis and the imaging of complex dynamics, including mode mixing.
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