Abstract:Due to its advantages of high sensitivity and wide frequency response, the optical fiber interferometric method is admirably suited for the applications of dynamic measurement. In this paper, an optical fiber Michelson interferometer is used to realize non-contact micro vibration measurement. An optical fiber collimator emits a laser beam to the measured surface and receives the reflected laser beam. The optical path change of the reflected light from the measured surface is converted to phase change through the non-balanced interferometer. Due to the external environmental effect, the initial phase random drift of fiber interferometer occurs. So the amplitude fluctuations of the interference signal seriously affect the output signal to noise ratio of the fiber interferometer. Therefore, in order to get the true phase information from interference signal, an effective method of signal demodulation is necessary to eliminate the influence of the initial phase drift in the phase measurement. In this paper, the phase signal demodulation is realized with PGC(Phase Generated Carrier) method based on ARCTAN calculation. A large amplitude phase modulation signal beyond the frequency range of the detected signal is introduced in the PGC demodulation method. The desired phase result could be obtained through ARCTAN calculation with the quotient of two orthogonal signals. The PGC method based on ARCTAN calculation eliminates the influence of the signal amplitude drift. This scheme owns a better response characteristic for the abrupt signals. In this paper, a non-contact micro vibration measurement experimental system based on the non-balanced interferometer is implemented in the laboratory. The frequency response range of 1~1KHz and the displacement resolution of 1nm in vibration situation are realized.

An Optic-Fiber Interferometer for the Dynamic Characterization of Microstructures.

Vibration Compensating Beam Scanning Interferometer for Surface Measurement

Monolithic Integrated Micro-Opto-Electromechanical Accelerometer Based on Michelson Interferometer Structure

Measurement of Dynamic Properties of Sensitive Elements in Uncooled IR Imaging Systems

Stroboscopic Interferometer for Dynamic MEMS Characterization

Optical Measuring Methods for Dynamic MEMS Characterization

Non-contact Micro Vibration Measurement System Based on Optical Fiber Michelson Interferometer

Rapid Measuring Method of Micro-Motion Based on Time-Averaged Microscopic Interferometry

Vibration Measurement of Smart Composite Structures by Using the New Intensity Modulated Optical Fiber Sensor

Characterization of Static and Dynamic Microstructures by Microscopic Interferometry Based on a Fourier Transform Method

A High-Resolution Dynamic Fiber-Optic Inclinometer

Measurement System For Mems Dynamics Characterization With Environmental Control Facility

Microelectromechanical Systems Motion Measurement and Modal Analysis Based on Doppler Interferometry

Measuring the Orientation of the Flexural Vibrations of a Cantilevered Microwire with a Micro-Lens Fiber-Optic Interferometer

Vibration-Displacement Measurements Based on the Phase Tracking of an Optical Fiber Michelson Interferometer

Robust In-Fiber Spatial Interferometer Using Multicore Fiber for Vibration Detection

MICRO-VIBRATION MEASUREMENT USING FABRY-PEROT INTERFEROMETER

Measurement System for Static and Dynamic Characterization of MEMS Based on Stroboscopic Imaging

Study on MEMS optical measurement system

Acoustic-Excitation Optical Coherence Vibrometer for Real-Time Microstructure Vibration Measurement and Modal Analysis

Non-contact Micro Vibration Measurement System Based on Non-equilibrium Optical Fiber Michelson Interferometer