Low Propagation Loss Binary ZrO2-SiO2 Optical Waveguides

Yingfeng Li,Shaojun Wang,Liying Liu,Lei Xu

2011-01-01

Abstract:ZrO2-SiO2 optical waveguides with low loss and large refractive index adjusting range were prepared by sol-gel process/dip-coating rapid thermal annealing treatment. Propagation loss is below 0.5 dB/cm even ZrO2 concentration is over 40%.

What problem does this paper attempt to address?

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods

P. Anantha,Lin Zhang,Wei Li,Xin Guo,Haodong Qiu,Gang Yih Chong,Callum G. Littlejohns,Milos Nedeljkovic,Jordi Soler Penades,Goran Z. Mashanovich,Hong Wang,Chuan Seng Tan

DOI: https://doi.org/10.1109/cleopr.2017.8118738

2017-01-01

Abstract:The successful fabrication of MIR Ge-on-Si waveguides written by both the high-resolution electron beam lithography (EBL) approach, as well as the wafer scale, high throughput approach using 365 nm i-line stepper lithography is reported. A low propagation loss of ~2.7 dB/cm at a wavelength of 3.8 μm is shown for Ge-on-Si waveguides patterned using the i-line stepper. The waveguide etching technique, using reactive ion or deep-reactive ion etching, is also analyzed. Furthermore, the propagation loss values for both the lithographic techniques are found to be comparable. Therefore the advantage of using a simpler i-line stepper lithography for high volume fabrication is highlighted.
Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

Qingyang Du,Yizhong Huang,Junying Li,Derek Kita,Jerome Michon,Hongtao Lin,Lan Li,Spencer Novak,Kathleen Richardson,Wei Zhang,Juejun Hu

DOI: https://doi.org/10.1364/ol.41.003090

IF: 3.6

2016-01-01

Optics Letters

Abstract:Low-loss waveguides constitute an important building block for integrated photonic systems. In this work, we investigated low-loss photonic device fabrication in Ge23Sb7S70 chalcogenide glass using electron beam lithography followed by plasma dry etching. High-index-contrast waveguides with a low propagation loss of 0.5 dB/cm and microdisk resonators with an intrinsic quality factor (Q-factor) of 1.2×106 were demonstrated. Both figures represent, to the best of our knowledge, the best low-loss results reported thus far in submicrometer single-mode chalcogenide glass devices.
The preparation of silica-based SiO2-ZrO2 films as waveguides by sol-gel process

Deliang Su,Guodong Qian,Zhiyu Wang,Zhanglian Hong,Mingquan Wang

DOI: https://doi.org/10.3321/j.issn:1002-185x.2004.z1.074

2004-01-01

Rare Metal Materials and Engineering

Abstract:ZrO2-SiO2 gel glass planar waveguides with various Zr contents were prepared by the low temperature sol-gel method with zirconium (IV)-propoxide stabilized with acetic acid and pre-hydrolyzed tetraethyl-orthosilicate (TEOS) as precursors. The films were deposited by spin-coating on silicon substrates. The films FTIR measurements were carried out. The refraction of the gels and films also were studied. It is found that the refractive index of mixed oxide gel glass with X-Zx <= 20% is linear with the Zr contents. By employing FTIR techniques, a new Zr-O-Si bond has been investigated with part of the zirconium ions being incorporated into the silica network. The refractive index of the blend sample can be turned with Zr contents. When the content of Zr is more than 20%, the zirconium (IV)-propoxide stabilized with acetic acid hydrolyzed incomplete. The existence of such complex resulted in lots of crackles in the films and the refraction index of mixed oxide gel glass and films non-linear with the Zr contents. The law of how to control the films thickness in spin-coating procedure was also studied.
Preparation and characterization of ZrO2–SiO2 binary films for planar optical waveguides

Bin Hua,Jinhai Si,Kazuyuki Hirao,Guodong Qian,Minquan Wang

DOI: https://doi.org/10.1016/j.jnoncrysol.2004.09.018

IF: 4.458

2005-01-01

Journal of Non-Crystalline Solids

Abstract:ZrO2–SiO2 binary films for active optical waveguides were prepared by the sol–gel method with zirconium oxychloride and tetraethoxysilane as precursors. The main factors that influence the film thickness and refractive index have been found. The relationship between the film refractive index composition and heat treatment temperature has been determined. The continuous tuning of the thickness and refractive index of the thin films has also been achieved, which will open up new possibilities in the development of active optical waveguides.
Ultra-Low-Loss Silicon Waveguides Covering a Very Large Band

Gangmin Li,Shihan Hong,Long Zhang,Zixu Xu,Daoxin Dai

DOI: https://doi.org/10.1109/ACP/POEM59049.2023.10368676

2023-01-01

Abstract:We present an ultra-low-loss silicon waveguide covering a very large band. Additionally, we investigate the waveguide wavelength-dependent scattering losses. Remarkably, we achieve loss reductions of (0.1663, 0.1226, 0.0742) dB/cm around (1310, 1550, 1910) nm, respectively.
Low propagation loss silicon-on-sapphire waveguides for the mid-infrared

Fangxin Li,Stuart D Jackson,Christian Grillet,Eric Magi,Darren Hudson,Steven J Madden,Yashodhan Moghe,Christopher O'Brien,Andrew Read,Steven G Duvall,Peter Atanackovic,Benjamin J Eggleton,David J Moss

DOI: https://doi.org/10.1364/OE.19.015212

2011-08-01

Abstract:We report record low loss silicon-on-sapphire nanowires for applications to mid infrared optics. We achieve propagation losses as low as 0.8 dB/cm at λ = 1550 nm, ~1.1 to 1.4 dB/cm at λ = 2080 nm and < 2dB/cm at λ = 5.18 μm.
Effectively Writing Low Propagation and Bend Loss Waveguides in the Silica Glass by Using a Femtosecond Laser.

D. E. Z. H. Tan,X. I. A. O. Y. U. Sun,Z. E. N. G. L. I. N. G. LI,J. I. A. N. R. O. N. G. Qiu

DOI: https://doi.org/10.1364/ol.470670

2022-01-01

Abstract:We report writing low-loss waveguides (WGs) by using a femtosecond laser in silica glass. A record low propagation loss of 0.07 dB/cm is achieved, and the lowest bend loss reaches 0.001 dB/mm with the bend radius of 30 mm. The optimal effective writing speed reaches 125 µm/s, which is two orders higher than the previous reported value. Fan-out devices with well controllable low loss for three-dimensional photonic integration are also fabricated. This work provides an effective strategy to create WG devices for 3D high-density photonic integration.
Ultra-low-loss High-Aspect-ratio Si3N4 Waveguides.

Jared F. Bauters,Martijn J. R. Heck,Demis John,Daoxin Dai,Ming-Chun Tien,Jonathon S. Barton,Arne Leinse,Rene G. Heideman,Daniel J. Blumenthal,John E. Bowers

DOI: https://doi.org/10.1364/oe.19.003163

IF: 3.8

2011-01-01

Optics Express

Abstract:We characterize an approach to make ultra-low-loss waveguides using stable and reproducible stoichiometric Si3N4 deposited with low-pressure chemical vapor deposition. Using a high-aspect-ratio core geometry, record low losses of 8-9 dB/m for a 0.5 mm bend radius down to 3 dB/m for a 2 mm bend radius are measured with ring resonator and optical frequency domain reflectometry techniques. From a waveguide loss model that agrees well with experimental results, we project that 0.1 dB/m total propagation loss is achievable at a 7 mm bend radius with this approach.
Low-loss Channel Waveguides and Y-splitter Formed by Ion-Exchange in Silica-on-silicon

Zian He,Yigang Li,Yingfeng Li,Yanwu Zhang,Liying Liu,Lei Xu

DOI: https://doi.org/10.1364/oe.16.012037

IF: 3.8

2008-01-01

Optics Express

Abstract:Low-loss ion-exchanged sol-gel channel waveguides on silicon substrate were fabricated. Ion-exchangeable aluminosilicate glass film was fabricated by sol-gel technique. Ag(+)-Li(+) thermal ion-exchange was used to achieve single mode channel waveguide. Propagation loss of 0.50 dB/cm and coupling loss of 0.76 dB/facet were measured by cutback method. A Y-branch power splitter was also fabricated. The results demonstrate that ion-exchange technique can be applied to prepare low-loss channel waveguides in thin film structures.
Study of Silicon-on-glass Waveguides

LI Guang-bo,LONG Wen-hua,JIA Ke-miao,JIANG Xiao-qing,WANG Ming-hua,WANG Yue-lin,YANG Jian-yi

DOI: https://doi.org/10.3969/j.issn.1005-5630.2005.06.011

2005-01-01

Abstract:In this paper,a method to fabricate silicon-on-glass(SOG) materials for the applications of integrated optics and photonics is proposed.Anodic silicon-glass boning and selective etching are applied.Experiments and measurement show that the surface quality of SOG materials mainly depends on the used silicon-on-insulator(SOI) wafers.When the SIMOX-based SOI wafers are used,the RMS roughness of the SOG surface will be about 3 nm and the auto-correlation length will be about 100 nm.The propagation loss of the SOG-based rib waveguides is at the same level of the employed SOI materials.The SOG material have the capabilities of SOI materials and can also be used for the applications in which the lower interface of the silicon core can be processed or the lower cladding is required to be thick.
Mode-tunable Low-Loss Waveguides in Glass for Visible Light Photonic Integrated Devices

Zengling Li,Yalun Wang,Jiajia Wu,Zhiqiang Wang,Minhan Lou,Ke Sun,Jianrong Qiu,Dezhi Tan

DOI: https://doi.org/10.1016/j.optlaseng.2024.108467

IF: 5.666

2024-01-01

Optics and Lasers in Engineering

Abstract:We have developed mode-tunable waveguides through femtosecond laser direct writing in glass. The structural changes and formation mechanisms were investigated by Raman mapping. The waveguide exhibited a record-low propagation loss of 0.14 dB/cm and an insertion loss of 0.23 dB at 520 nm. This work presents a new technique for producing waveguides for visible light photonic integrated devices.
Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Bowei Dong,Xin Guo,Chong Pei Ho,Bo Li,Hong Wang,Chengkuo Lee,Xianshu Luo,Guo-Qiang Lo

DOI: https://doi.org/10.1109/jphot.2017.2692039

IF: 2.4

2017-01-01

IEEE Photonics Journal

Abstract:In this paper, we demonstrate silicon-on-insulator (SOI) channel waveguides with propagation loss and $r$ = 10 $\mu$$\text{m}$ bends with bending loss as low as 2 dB/cm and 0.02 dB/90 $^{\circ }$ in the broad wavelength range of 3.68–3.88 $\mu$ $\text{m}$. We also indicate the limitation of SOI waveguide loss in mid-infrared wavelength by analyzing loss mechanisms. Based on this high-performance mid-infrared waveguide, we systematically analyze the coupling efficiency of various directional couplers, which are critical and commonly used building blocks for on-chip light routing and power splitting. By varying coupling length and sweeping wavelength, the performance of directional coupler with various gap separations is meticulously investigated in 3.68–3.88 $\mu$ $\text{m}$. A experimental database for directional coupler with any power splitting ratio is provided. Our results offer a promising broadband platform for dense wavelength division multiplexing (DWDM) and applications that require precise control of coupling such as racetrack resonator in the mid-infrared region.
High quality waveguides for the mid-infrared wavelength range in a silicon-on-sapphire platform

Fangxin Li,Stuart D. Jackson,Christian Grillet,Eric Magi,Darren Hudson,Steven J. Madden,Yashodhan Moghe,Christopher OBrien,Andrew Read,Steven G. Duvall,Peter Atanackovic,Benjamin J. Eggleton,David J. Moss

DOI: https://doi.org/10.1364/OE.19.015212

2017-05-29

Abstract:We report record low loss silicon-on-sapphire nanowires for applications to mid infrared optics. We achieve propagation losses as low as 0.8dB/cm at 1550nm, 1.1 to 1.4dB/cm at 2080nm and < 2dB/cm at = 5.18 microns.

Applied Physics,Optics
Low loss long range surface plasmon polariton waveguides

Yidong Huang,Fang Liu,Yi Rao,Ruiyan Wan

DOI: https://doi.org/10.1109/INOW.2007.4302888

2007-01-01

Abstract:Low loss long-range surface plasmon polariton waveguides were realized with propagation loss of as low as 0.67dB/mm. Their various potential applications are discussed in this paper. © 2007 IEEE.
Low Loss Smart Hollow Waveguides with New Polymer Coating Material

Yi-Wei Shi,Yukio Abe,Yuji Matsuura,Mitsunobu Miyagi

DOI: https://doi.org/10.1016/s0030-3992(99)00017-1

IF: 4.939

1999-01-01

Optics & Laser Technology

Abstract:A new kind of cyclic olefin polymer COP-E48R has been selected as the dielectric material for a silver hollow glass tube. Owing to its lower extinction coefficient at the wavelength of 10.6 μm, transmission losses for the CO2 laser light has been reduced significantly in the COP-E48R-coated silver (COP-E48R/Ag) hollow glass waveguide. By properly selecting the film thickness of COP, Er:YAG and CO2 laser light are shown to be transmitted with low loss simultaneously or independently. Delivery properties of red and green pilot beams were also evaluated.
Low Loss Performances of Long Range Surface Plasmon Polariton Waveguides with Buffer Layer Structures

Yi Rao,Fang Liu,Yidong Huang,Wei Zhang,Jiangde Peng

DOI: https://doi.org/10.1109/aoe.2007.4410846

2007-01-01

Abstract:Long range surface plasmon strip waveguide with low refractive index dielectric buffer layers is proposed in this paper. Simulation results show that ultra low propagation loss can be obtained.
Low-loss, Geometry-Invariant Optical Waveguides with Near-Zero-index Materials

Danqing Wang,Kaichen Dong,Jingang Li,Costas Grigoropoulos,Jie Yao,Jin Hong,Junqiao Wu

DOI: https://doi.org/10.1515/nanoph-2022-0445

2022-01-01

Abstract:Optical materials with nearly zero refractive indices have driven emerging applications ranging from geometry-invariant optical tunneling, nonlinear optics, optical cloaking to thermal emission manipulation. In conventional dielectric photonic circuits, light scattering and back reflection at the waveguide bends and crossings leads to significant optical loss. Here we propose to use near-zero-index materials as a cladding layer for low-loss optical waveguides, where optical modes are tightly confined within the dielectric core region. Compared to conventional waveguides, the near-zero-index waveguides are superior in maintaining a high mode-filling factor for small device sizes close to the diffraction limit and reducing the crosstalk in between at a sub-wavelength separation. In addition, we found that light propagation is robust to waveguide bends in a small radius (∼µm) and geometry variation in the cross section. Hollow waveguides with near-zero-index cladding layers further support low-loss light propagation because materials absorption is minimized from the air core. Our work offers critical insights into future designs of low-loss and miniaturized photonic devices.
Mitigating waveguide loss in Ge-Sb-Se chalcogenide glass photonics

Fengbo Han,Yunfei Niu,Yan Zhang,Jue Gong,Shaoliang Yu,Qingyang Du

DOI: https://doi.org/10.1088/1361-6463/ad43f5

2024-04-28

Journal of Physics D Applied Physics

Abstract:Minimizing propagation loss within waveguides remains a central objective across diverse photonic platforms, impacting both linear lightwave transmission and nonlinear wavelength conversion efficiencies. Here, we present a method to mitigate waveguide loss in Ge28Sb12Se60 chalcogenide glass, a material known for its high nonlinearity, broad mid-infrared transparency, and significant potential for mid-IR photonics applications. By applying a sacrifical oxide layer to eliminate etching residues and a subsequent waveguide thermal reflow to smooth lithography-induced line edge roughness, we successfully reduced the waveguide loss down to 0.8 dB/cm. This represents the best result in small-core and high-index-contrast Ge28Sb12Se60 channel waveguides. Our approach paves the way for low-loss, on-chip mid-infrared chalcogenide photonic devices.

physics, applied
New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Long Zhang,Shihan Hong,Yiwei Xie,Daoxin Dai

DOI: https://doi.org/10.1364/acpc.2021.t1i.6

2021-01-01

Abstract:We propose the concept of silicon photonics beyond the singlemode regime with ultra-low-loss propagation of 0.065 dB/cm. The state-of-art micro-racetrack resonator, high-resolution microwave filter and 100-cm-long delayline are demonstrated with standard 220-nm-SOI (silicon-on-insulator) MPW-foundry processes.
3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals

Daoyuan Chen,Zhi Chen,Yi Yang,Yuying Wang,Xuhu Han,Kuen Yao Lau,Zhemin Wu,Chen Zou,Yu Zhang,Beibei Xu,Xiaofeng Liu,Zhijun Ma,Guoping Dong,Giuseppe Barillaro,Lijing Zhong,Jianrong Qiu

DOI: https://doi.org/10.1002/adma.202404493

IF: 29.4

2024-05-10

Advanced Materials

Abstract:Optical waveguides fabricated in single crystals offer crucial passive/active optical components for photonic integrated circuits. Single crystals possess inherent advantages over their amorphous counterpart, such as lower optical losses in visible‐to‐mid‐infrared band, larger peak emission cross‐section, higher doping concentration. However, the writing of Type‐I positive refractive index modified waveguides in single crystals using femtosecond laser technology presents significant challenges. Herein, we introduce a novel femtosecond laser direct writing technique that combines slit‐shaping with an immersion oil objective to fabricate low‐loss Type‐I waveguides in single crystals. This approach allows for precise control of waveguide shape, size, mode‐field and refractive index distribution, with a spatial resolution as high as 700 nm and a high positive refractive index variation on the order of 10−2, introducing new degrees of freedom to design and fabricate passive/active optical waveguide devices. As a proof‐of‐concept, we successfully produced a 7 mm‐long circular‐shaped gain waveguide (∼10 μm in diameter) in an Er3+‐doped YAG single crystal, exhibiting a propagation loss as low as 0.23 dB/cm, a net gain of ∼3 dB and a polarization‐insensitive character. The newly‐developed technique is theoretically applicable to arbitrary single crystals, holding promising potential for various applications in integrated optics, optical communication, and photonic quantum circuits. This article is protected by copyright. All rights reserved

materials science, multidisciplinary,nanoscience & nanotechnology,physics, applied,chemistry, physical, condensed matter

Low Propagation Loss Binary ZrO2-SiO2 Optical Waveguides

Low Propagation Loss Ge-on-Si Waveguides and Their Dependency on Processing Methods

Low-loss Photonic Device in Ge-Sb-S Chalcogenide Glass.

The preparation of silica-based SiO2-ZrO2 films as waveguides by sol-gel process

Preparation and characterization of ZrO2–SiO2 binary films for planar optical waveguides

Ultra-Low-Loss Silicon Waveguides Covering a Very Large Band

Low propagation loss silicon-on-sapphire waveguides for the mid-infrared

Effectively Writing Low Propagation and Bend Loss Waveguides in the Silica Glass by Using a Femtosecond Laser.

Ultra-low-loss High-Aspect-ratio Si3N4 Waveguides.

Low-loss Channel Waveguides and Y-splitter Formed by Ion-Exchange in Silica-on-silicon

Study of Silicon-on-glass Waveguides

Mode-tunable Low-Loss Waveguides in Glass for Visible Light Photonic Integrated Devices

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

High quality waveguides for the mid-infrared wavelength range in a silicon-on-sapphire platform

Low loss long range surface plasmon polariton waveguides

Low Loss Smart Hollow Waveguides with New Polymer Coating Material

Low Loss Performances of Long Range Surface Plasmon Polariton Waveguides with Buffer Layer Structures

Low-loss, Geometry-Invariant Optical Waveguides with Near-Zero-index Materials

Mitigating waveguide loss in Ge-Sb-Se chalcogenide glass photonics

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

3D Laser Writing of Low‐Loss Cross‐Section‐Variable Type‐I Optical Waveguide Passive/Active Integrated Devices in Single Crystals