Research of Cell Topology on Characteristics of 750V SiC MOSFETs

Runhua Huang,Yue Zhang,Tao Liu,Teng Zhang,Shiyan Li,Song Bai,Yong Yang,Yun Li,Zhifei Zhao
DOI: https://doi.org/10.1109/SSLChinaIFWS60785.2023.10399705
2023-01-01
Abstract:This paper analyzes the relationship between channel density and cell size of several common SiC MOSFET cell structures. The 750V60mΩ SiC MOSFET was fabricated based on the improved hexagonal cell. Then the static and dynamic performance tests of the device were completed. Finally, the specific on-resistance of 2.05 mΩ·cm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> and the breakdown voltage of 950V are obtained.
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