10 5 × Endurance Improvement of FE-HZO by an Innovative Rejuvenation Method for 1z Node NV-DRAM Applications

Tiancheng Gong,Lei Tao,Junkang Li,Yan Cheng,Youqian Xu,Wei,Pengfei Jiang,Peng Yuan,Yuan Wang,Yu‐Ting Chen,Yaxin Ding,Yang,Yan Wang,Bing Chen,Qing Luo,Steve S. Chung,Shixuan Du,Ming Liu
2021-01-01
Abstract:High operating voltage and low endurance are obstacles for FE HZO to be a viable candidate for NV-DRAM technology. In this work, we provide a breakthrough solution for HZO towards 1z node NV-DRAM application. Firstly, the endurance failure mechanism of HZO film under low-electric field ( 1014) are quite promising towards 1z node NV-DRAM applications.
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