Ultralow-loss Compact Silicon Photonic Waveguide Spirals

Shihan Hong,Long Zhang,Yi Wang,Ming Zhang,Yiwei Xie,Daoxin Dai

DOI: https://doi.org/10.1364/acpc.2021.t1d.3

2021-01-01

Abstract:We propose and demonstrate a novel silicon photonic spiral with a tapered-Euler-S-bend. A 100-cm-long waveguide spiral is realized with a bending radius as small as 10 μm, while the measured propagation loss is as low as 0.28 dB/cm.

What problem does this paper attempt to address?

Waveguide Bends from Nanometric Silica Wires

LM Tong,IY Lou,E Mazur

DOI: https://doi.org/10.1117/12.575598

2005-01-01

Abstract:We propose to use bent silica wires with nanometric diameters to guide light as optical waveguide bend. We bend silica wires with scanning tunneling microscope probes under an optical microscope, and wire bends with bending radius smaller than 5 mu m are obtained. Light from a He-Ne laser is launched into and guided through the wire bends, measured bending loss of a single bend is on the order of 1 dB. Brief introductions to the optical wave guiding and elastic bending properties of silica wires are also provided. Comparing with waveguide bends based on photonic bandgap structures, the waveguide bends from silica nanometric wires show advantages of simple structure, small overall size, easy fabrication and wide useful spectral range, which make them potentially useful in the miniaturization of photonic devices.
Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

Lin Han,Xiaoke Ruan,Weijie Tang,Tao Chu

DOI: https://doi.org/10.1364/oe.451104

IF: 3.8

2022-01-01

Optics Express

Abstract:An ultralow-loss silicon planar waveguide crossing operating in the O-band was experimentally demonstrated based on the Gaussian beam synthesis method. Elliptical parabolic inverted tapers were introduced in our design to reduce the crossing loss. According to the measurement results, the proposed device exhibits an insertion loss of 0.008 dB, which is the lowest reported loss for planar silicon waveguide crossings operating in the O-band. The device exhibits a low crosstalk below -40 dB over a 40 nm wavelength range with a compact footprint of 18 × 18 µm2 and can be fabricated in a complementary metal-oxide-semiconductor-compatible process.
New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Long Zhang,Shihan Hong,Yiwei Xie,Daoxin Dai

DOI: https://doi.org/10.1364/acpc.2021.t1i.6

2021-01-01

Abstract:We propose the concept of silicon photonics beyond the singlemode regime with ultra-low-loss propagation of 0.065 dB/cm. The state-of-art micro-racetrack resonator, high-resolution microwave filter and 100-cm-long delayline are demonstrated with standard 220-nm-SOI (silicon-on-insulator) MPW-foundry processes.
Ultra-Small Silicon Photonic Wire Waveguide Devices

Tao Chu,Hirohito Yamada,Shigeru Nakamura,Masashige Ishizaka,Masatoshi Tokushima,Yutaka Urino,Satomi Ishida,Yasuhiko Arakawa

DOI: https://doi.org/10.1587/transele.e92.c.217

2009-01-01

IEICE Transactions on Electronics

Abstract:Silicon photonic devices based on silicon photonic wire waveguides are especially attractive devices, since they can be ultra-compact and low-power consumption. In this paper, we demonstrated various devices fabricated on silicon photonic wire waveguides. They included optical directional couplers, reconfigurable optical add/drop multiplexers, 1 x 2, 1 x 4, 1 x 8 and 4 x 4 optical switches, ring resonators. The characteristics of these devices show that silicon photonic wire waveguides offer promising platforms in constructing compact and power-saving photonic devices and systems.
Low-loss and Power-Efficient Phase Shifter Based on an Optimized Multimode Spiral Silicon Waveguide.

Shi Zhao,Jingye Chen,Daoxin Dai,Yaocheng Shi

DOI: https://doi.org/10.1364/ol.501010

2023-01-01

Abstract:Low-loss and energy-efficient phase shifters are an effec-tive tool to reduce the power consumption of large-scale photonic integrated circuits. In this work, a low-loss and power-efficient thermo-optic phase shifter has been demon-strated on the silicon-on-insulator platform. The multimode spiral waveguide is optimized to obtain lower power con-sumption and low cross talk. The waveguide width is beyond the single-mode region in consideration of low propagation loss. The optimized ultra-low loss 180 degrees Bezier bends are used to further reduce the bending loss. The experimental results show that the excess loss of the phase shifter is only 0.36 dB at 1550-nm wavelength and the power consumption is 4.87 mW/pi. (c) 2023 Optica Publishing Group
Efficient Adiabatic Silicon-on-insulator Waveguide Taper

Yunfei Fu,Tong Ye,Weijie Tang,Tao Chu

DOI: https://doi.org/10.1364/prj.2.000a41

IF: 7.6

2014-01-01

Photonics Research

Abstract:A silicon-on-insulator-based adiabatic waveguide taper with a high coupling efficiency and small footprint is presented. The taper was designed to reduce the incidence of mode conversion to higher-order and radiation modes inside the waveguide. In connecting a 0.5-mu m-wide output waveguide and a 12-mu m-wide input waveguide of a grating coupler, a compact 120-mu m-long taper was demonstrated, achieving a transmission of 98.3%. Previously, this transmission level could only be achieved using a conventional linear taper with a length of more than 300 mu m. (C) 2014 Chinese Laser Press
Low-loss and Low-Crosstalk Multimode Waveguide Bend on Silicon.

Xiaohui Jiang,Hao Wu,Daoxin Dai

DOI: https://doi.org/10.1364/oe.26.017680

IF: 3.8

2018-01-01

Optics Express

Abstract:A low-loss and low-crosstalk multimode waveguide bend is proposed and demonstrated for mode-division-multiplexed optical interconnects. The proposed 90°-bend is composed of two identical 45°-bends, which are defined as modified Euler curves. For the designed 90° Euler-bend with a core width of 2.36 μm for supporting four TM-polarization modes, it is allowed to achieve an effective radius as small as 45 μm, which is about 1/4 of the radius (~175 μm) for a regular 90° arc-bend. In theory, this proposed 90° Euler-bend has very low excess losses (<0.1 dB) and very low inter-mode crosstalks (<-25 dB) over a broad wavelength-band. A silicon photonic integrated circuit is designed, fabricated and characterized by integrating a pair of mode (de)multiplexers and a multimode bus waveguide with a Euler S-bend consisting of two cascaded 90° Euler-bends. The measurement results show that the fabricated Euler S-bend has low excess losses of <0.5 dB and low inter-mode crosstalks of <-20 dB over a broad band from 1520 nm to 1610 nm for all the 4 mode-channels of TM polarization.
Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Bowei Dong,Xin Guo,Chong Pei Ho,Bo Li,Hong Wang,Chengkuo Lee,Xianshu Luo,Guo-Qiang Lo

DOI: https://doi.org/10.1109/jphot.2017.2692039

IF: 2.4

2017-01-01

IEEE Photonics Journal

Abstract:In this paper, we demonstrate silicon-on-insulator (SOI) channel waveguides with propagation loss and $r$ = 10 $\mu$$\text{m}$ bends with bending loss as low as 2 dB/cm and 0.02 dB/90 $^{\circ }$ in the broad wavelength range of 3.68–3.88 $\mu$ $\text{m}$. We also indicate the limitation of SOI waveguide loss in mid-infrared wavelength by analyzing loss mechanisms. Based on this high-performance mid-infrared waveguide, we systematically analyze the coupling efficiency of various directional couplers, which are critical and commonly used building blocks for on-chip light routing and power splitting. By varying coupling length and sweeping wavelength, the performance of directional coupler with various gap separations is meticulously investigated in 3.68–3.88 $\mu$ $\text{m}$. A experimental database for directional coupler with any power splitting ratio is provided. Our results offer a promising broadband platform for dense wavelength division multiplexing (DWDM) and applications that require precise control of coupling such as racetrack resonator in the mid-infrared region.
Compact Low-Loss Adiabatic Bends in Silicon Shallow-Etched Waveguides

Xin Tu,Ming Li,Jia Jiang,Dominic Goodwill,Patrick Dumais,Eric Bernier,Hongyan Fu,Dongyu Geng

DOI: https://doi.org/10.1109/group4.2016.7739046

2016-01-01

Abstract:We report an adiabatic bend based on silicon shallow-etched waveguide using a sine-circle-sine design. The loss per 180° turn is 0.05 dB for 5 μm bend and 0.008 dB 10 μm bend for TE polarization, which are significantly lower than that of a circular bend.
Low Loss Sharp Bend for Silicon Nanophotonic Slow-Light Waveguide

Huaidang Yi,Yi Wang,Junbo Feng,Yao Chen,Zhiping Zhou

DOI: https://doi.org/10.1109/group4.2008.4638180

2008-01-01

Abstract:A low loss sharp bend is proposed and analyzed in the slow-light waveguide which is consisted of a series of silicon nanopillars. More than 90% of transmission over 100nm bandwidth is obtained.
Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Xiaoyan Liu,Lin Han,Xiaoke Ruan,Tao Chu

DOI: https://doi.org/10.1364/OL.494537

IF: 3.6

2023-01-01

Optics Letters

Abstract:We demonstrated a SiN-SiN-Si three-layer silicon waveguide crossing with low-loss crossings and interlayer couplers. The underpass and overpass crossings exhibited ultralow loss (< 0.82/1.16 mdB) and cross talk (<-56/-48 dB) in the wave-length range of 1260-1340 nm. To reduce the loss and length of the interlayer coupler, a parabolic interlayer coupling structure was adopted. The measured interlayer coupling loss was less than 0.11 dB from 1260 to 1340 nm, which is, to the best of our knowledge, the lowest loss reported for an interlayer coupler based on a SiN-SiN-Si three-layer plat-form. The total interlayer coupler length was only 120 & mu;m.& COPY; 2023 Optica Publishing Group
Ultra-Low-Loss Silicon Waveguides Covering a Very Large Band

Gangmin Li,Shihan Hong,Long Zhang,Zixu Xu,Daoxin Dai

DOI: https://doi.org/10.1109/ACP/POEM59049.2023.10368676

2023-01-01

Abstract:We present an ultra-low-loss silicon waveguide covering a very large band. Additionally, we investigate the waveguide wavelength-dependent scattering losses. Remarkably, we achieve loss reductions of (0.1663, 0.1226, 0.0742) dB/cm around (1310, 1550, 1910) nm, respectively.
Compact and Low-Loss 1 × 3 Polarization-Insensitive Optical Power Splitter Using Cascaded Tapered Silicon Waveguides

Hongxiang Li,Weiwei Chen,Pengjun Wang,Shixun Dai,Yuxiao Liu,Qiang Fu,Jun Li,Yan Li,Tingge Dai,Hui Yu,Jianyi Yang

DOI: https://doi.org/10.1364/ol.401036

2020-01-01

Abstract:In this Letter, a 1 × 3 polarization-insensitive optical power splitter based on cascaded tapered silicon waveguides is proposed and experimentally demonstrated on a silicon-on-insulator platform. By utilizing the particle swarm optimization algorithm and the finite difference time domain method, the structural parameters of the coupling regions are carefully designed to achieve polarization-insensitive property, compact size, low insertion loss, high uniformity, and broad bandwidth. The coupling length can be as short as 7.3 µm. Our measurement results show that, at 1550 nm, the insertion losses of the fabricated device operating in transverse electric (TE) and transverse magnetic (TM) polarizations are, respectively, 0.068 dB and 0.62 dB. Within a bandwidth from 1525 to 1575 nm, the insertion loss is lower than 0.82 dB and the uniformity is less than 1 dB for the fabricated device operating in TE polarization, while the fabricated device operating in TM polarization can have an insertion loss smaller than 1.50 dB and a uniformity lower than 1 dB from 1528 to 1582 nm.
Ultra-low loss waveguide platform in silicon photonics

Arijit Bera,Yisbel Marin,Mikko Harjanne,Matteo Cherchi,Timo Aalto

DOI: https://doi.org/10.1117/12.2610022

2022-03-05

Abstract:Silicon photonics is the most promising technology for applications ranging from large-bandwidth, low power consumption datacom transceivers, to wearable health monitoring devices, or optical data-bus for quantum processors. To bring silicon PIC based products to the market, ultra-low loss waveguides would be preferred. In the conventional submicron silicon platforms, higher propagation loss (in the order of ~1 dB/cm) induced by the roughness of the etched sidewalls, as well as higher fiber-to-waveguide coupling loss due to its sub-micron dimensions impose challenges for its deployment in many products. VTT’s thick-SOI technology offers a promising alternative, owing to its lower propagation loss (~0.1 dB/cm), reduced polarization sensitivity, and capacity to handle higher optical power without exciting nonlinear losses. Its micron-scale cross-section enables efficient edge coupling. Exploiting its ultra-low loss, we have demonstrated unprecedented level of integration such as, a 40-channel array waveguide grating (AWG) based mux/de-mux, or a Faraday rotator based on silicon spirals, without employing any magneto-optic material. Now we reduced the propagation loss further, down to record-low 4 dB/m, by controlled annealing of waveguides in 100% pure H2 environment. In our optimized, MPW-compatible annealing process, the atomic mobility of Si smoothens the scallops from etching, without causing any structural deformation of the waveguides. This substantially reduced loss enabled us to develop ultra-high Q ring resonators on our thick-SOI platform, as well as sidewall smoothening for the active components, thereby making our platform a bedrock for the emerging applications such as, quantum computing, biosensors, and 3D imaging.
Low loss hollow-core waveguide on a silicon substrate

Weijian Yang,James Ferrara,Karen Grutter,Anthony Yeh,Chris Chase,Yang Yue,Alan E. Willner,Ming C. Wu,Connie J. Chang-Hasnain

DOI: https://doi.org/10.1515/nanoph-2012-0003

IF: 7.5

2012-06-21

Nanophotonics

Abstract:Abstract Optical-fiber-based, hollow-core waveguides (HCWs) have opened up many new applications in laser surgery, gas sensors, and non-linear optics. Chip-scale HCWs are desirable because they are compact, light-weight and can be integrated with other devices into systems-on-a-chip. However, their progress has been hindered by the lack of a low loss waveguide architecture. Here, a completely new waveguiding concept is demonstrated using two planar, parallel, silicon-on-insulator wafers with high-contrast subwavelength gratings to reflect light in-between. We report a record low optical loss of 0.37 dB/cm for a 9-μm waveguide, mode-matched to a single mode fiber. Two-dimensional light confinement is experimentally realized without sidewalls in the HCWs, which is promising for ultrafast sensing response with nearly instantaneous flow of gases or fluids. This unique waveguide geometry establishes an entirely new scheme for low-cost chip-scale sensor arrays and lab-on-a-chip applications.

optics,physics, applied,materials science, multidisciplinary,nanoscience & nanotechnology
Compact Silicon Photonic Waveguide Crossings with Sub- 10-Mdb Loss

Yingying Peng,Huan Li,Daoxin Dai

DOI: https://doi.org/10.1364/acpc.2021.t4a.130

2021-01-01

Abstract:We have designed and experimentally demonstrated silicon photonic waveguide crossings for the TE fundamental mode with record-low loss of $6\pm 2\ \text{mdB}$ in the wavelength range of 1520–1560 nm.
Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

Long Zhang,Shihan Hong,Yi Wang,Hao Yan,Yiwei Xie,Tangnan Chen,Ming Zhang,Zejie Yu,Yaocheng Shi,Liu Liu,Daoxin Dai

DOI: https://doi.org/10.1002/lpor.202100292

2022-01-01

Abstract:Silicon photonics beyond the singlemode regime is applied for enabling ultralow-loss waveguide propagation for the fundamental mode even without any special fabrication process. Here a micro-racetrack resonator is fabricated with a standard 220-nm-SOI (silicon-on-insulator) multiproject-wafer foundry and shows a record high intrinsic quality factor of 1.02x10(7), corresponding to an ultralow propagation loss of only 0.065 dB cm(-1), which is about 20 times less than that of regular 450-nm-wide waveguides on the same chip. A state-of-the-art microwave photonic filter on silicon is then realized with an ultranarrow 3-dB bandwidth of 20.6 MHz and a tuning range of approximate to 20 GHz for the first time. A 100-cm-long delayline employed the broadened waveguides is also demonstrated with compact 90 degrees Euler-curve bends, and the measured average propagation loss is about 0.14 dB cm(-1). The concept of silicon photonics beyond the singlemode regime helps solve the issue of high propagation loss significantly. In particular, it enables silicon photonic devices with enhanced performances, which paves the way for realizing large-scale silicon photonic integration. This concept can be extended further to any other material platforms, such as silicon nitride and lithium niobate. This also brings numerous new opportunities for various applications such as nonlinear photonics, large-scale photonic integration, quantum photonics, microwave photonics, etc.
New silicon photonics integration platform enabled by novel micron-scale bends

Matteo Cherchi,Sami Ylinen,Mikko Harjanne,Markku Kapulainen,Timo Aalto

DOI: https://doi.org/10.1364/OE.21.017814

2013-01-09

Abstract:Even though submicron silicon waveguides have been proposed for dense integration of photonic devices, to date the lightwave circuits on the market mainly rely on waveguides with micron-scale core dimensions. These larger waveguides feature easier fabrication, higher reliability and better interfacing to optical fibres. Single-mode operation with large core dimensions is obtained with low lateral refractive index contrast. Hence, the main limitation in increasing the level of integration and in reducing the cost of micron-scale waveguide circuits is their mm- to cm-scale minimum bending radius. Fortunately, single-mode rib waveguides with a micron-scale silicon core can be locally transformed into multi-mode strip waveguides that have very high lateral index contrast. Here we show how Euler spiral bends realized with these waveguides can have bending radii below 10 {\mu}m and losses below 0.02 dB/90° for the fundamental mode, paving way for a novel densely integrated platform based on micron-scale waveguides.

Optics
Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm

xiangdong li,xue feng,xian xiao,yihang li,kaiyu cui,fang liu,yidong huang

DOI: https://doi.org/10.1109/LPT.2015.2478900

IF: 2.6

2016-01-01

IEEE Photonics Technology Letters

Abstract:Silicon slot waveguides operating at a wavelength of high silicon absorption are fabricated on silicon-on-insulator wafers. The measured transmission loss coefficient is as low as 6 similar to 8 dB/cm at 1064 nm, which is much lower than the material absorption. In addition, the bending loss of the slot waveguides is measured as 4.1 similar to 4.6 dB/180 degrees with a bending radius of 15 mu m. Both the transmission and bending losses are analyzed and discussed. We believe that this work could pave the way to achieve all-silicon photonic integrated circuits, which are very promising for a future on-chip chemical/biological analysis.
Ultra-Low Loss, Chip-Based Hollow-Core Waveguide Using High-Contrast Grating

Constance Chang-Hasnain,Ming Wu,Eli Yablonovitch

DOI: https://doi.org/10.21236/ada554981

2011-09-28

Abstract:The goal of this program is to develop a chip-scale, integrated photonic platform with fiber-like losses for optical delay applications. The ability to generate long optical delays with low intrinsic loss is useful for a wide range of high precision military applications and systems including: high time-bandwidth product analog optical signal processors and delay lines for wideband RF systems, optical buffers for all-optical routing networks, and ultra-stable optical interferometers for sensing applications, e.g. rotation sensors. We report a completely new concept of chip-scale hollow-core waveguide (HCW) which eliminates dispersion and nonlinearity in typical waveguide core. We demonstrated a new waveguiding design consisting of two parallel silicon-on-insulator wafers, each containing a single layer of high-contrast subwavelength grating (HCG) to reflect light in-between. The optical confinement without any physical boundary is created by variation of HCG dimensions and demonstrated for the first time in a planar HCW with a record low loss of 0.37 dB/em. Two-dimensional light confinement in are demonstrated for both straight and curved waveguides. The unique waveguide geometry not only adds new elements into the waveguiding theory, but also will make possible costeffective manufacturing of integrated optics for chip-scale gas/fluidic sensor, athermal photonic delays lines, and lab-on-a-chip applications.

Ultralow-loss Compact Silicon Photonic Waveguide Spirals

Waveguide Bends from Nanometric Silica Wires

Ultralow-loss Waveguide Crossing for Photonic Integrated Circuits by Using Inverted Tapers

New-generation Ultra-Low Loss Silicon Photonic Waveguide and Devices

Ultra-Small Silicon Photonic Wire Waveguide Devices

Low-loss and Power-Efficient Phase Shifter Based on an Optimized Multimode Spiral Silicon Waveguide.

Efficient Adiabatic Silicon-on-insulator Waveguide Taper

Low-loss and Low-Crosstalk Multimode Waveguide Bend on Silicon.

Silicon-on-Insulator Waveguide Devices for Broadband Mid-Infrared Photonics

Compact Low-Loss Adiabatic Bends in Silicon Shallow-Etched Waveguides

Low Loss Sharp Bend for Silicon Nanophotonic Slow-Light Waveguide

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Ultra-Low-Loss Silicon Waveguides Covering a Very Large Band

Compact and Low-Loss 1 × 3 Polarization-Insensitive Optical Power Splitter Using Cascaded Tapered Silicon Waveguides

Ultra-low loss waveguide platform in silicon photonics

Low loss hollow-core waveguide on a silicon substrate

Compact Silicon Photonic Waveguide Crossings with Sub- 10-Mdb Loss

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

New silicon photonics integration platform enabled by novel micron-scale bends

Silicon Slot Waveguides With Low Transmission and Bending Losses at 1064 nm

Ultra-Low Loss, Chip-Based Hollow-Core Waveguide Using High-Contrast Grating