Compact Low-Loss Adiabatic Bends in Silicon Shallow-Etched Waveguides

Xin Tu,Ming Li,Jia Jiang,Dominic Goodwill,Patrick Dumais,Eric Bernier,Hongyan Fu,Dongyu Geng
DOI: https://doi.org/10.1109/group4.2016.7739046
2016-01-01
Abstract:We report an adiabatic bend based on silicon shallow-etched waveguide using a sine-circle-sine design. The loss per 180° turn is 0.05 dB for 5 μm bend and 0.008 dB 10 μm bend for TE polarization, which are significantly lower than that of a circular bend.
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