SILICON DIRECT BONDING (SDB) WITH HYDROPHOBIC SURFACE TREATMENTS

Haijun Wang,Qian Zhao-Ming
1995-01-01
Abstract:Silicon wafers with hydrophobia surfaces have been successfully bonded in our lab with good mechanical and electrical properties at the bonded interfaces. Based on the chemical properties of HF acid and the chemical reaction during hydrophobic treatment, a provisional mechanism of SDB with hydrophobic surface is proposed and discussed. We conclude that the fluor is the main linking atom between bonded silicon atoms.
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