Abstract:A novel method for fabricating shape-controlled and well-arrayed heterogeneous nanostructures by altering the melting point of the metal thin film at the nanoscale is proposed. Silver nanofilms (AgNFs) are transformed into silver nanoislands (AgNIs), silver nanoparticles (AgNPs), and silver nanogaps (AgNGs) that are well-ordered and repositioned inside the gold nanoholes (AuNHs) depending on the diameter of the AuNHs, the thickness of the AgNF, and the heating temperature (120–200 °C). This method demonstrates the ability to fabricate uniform, stable, and unique structures with a fast, simple, and mass-producible process. For demonstrating the diverse applicability of the developed structures, high-density AgNGs inside the AuNHs are utilized as surface-enhanced Raman spectroscopy (SERS) substrates. These AgNGs-based SERS substrates exhibit a performance enhancement, which is 1.06 × 10<sup>6</sup> times greater than that of a metal film, with a relative standard deviation of 19.8%. The developed AgNP/AgNI structures are also used as nonreproducible anti-counterfeiting signs, and the anti-counterfeiting/readout system is demonstrated via image processing. Therefore, our method could play a vital role in the nanofabrication of high-demand nanostructures.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsami.0c18122?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsami.0c18122</a>.Low-magnification SEM images of the fabricated samples (Figure S1); SEM morphologies of the fabricated heterogeneous nanostructures depending on the heating temperature (120–200 °C) (Figure S2); the morphologies of heterogeneous nanostructures depending on the heating time from 1 to 20 min at an interval of 2 min (Figure S3); low- and high-magnification SEM images of the heterogeneous nanostructures fabricated on the 6 in. wafer (Figure S4); SEM images of the five different specimens fabricated using the same conditions (Figure S5); low- and high-magnification SEM images of the heterogeneous nanostructures before and after peel test (Figure S6); SEM images of the fabricated well-aligned nanostructures with various shapes (Figure S7); Raman signal of the R6G molecule on the nine different points of the same substrate (Figure S8); results of long-term stability test for anti-counterfeiting applications (Figure S9) (<a class="ext-link" href="/doi/suppl/10.1021/acsami.0c18122/suppl_file/am0c18122_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.

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