TCAD Simulation Performance of VGAA for 4F2 High Density DRAM Cell

Wen-Qi Wang,Xiang Liu,Yong Yu,De-Yuan Xiao,Lan-Song Ba,Hong-Gang Liang,Jing Liang,Jong-Sung Jeon,Xing-Song Su,Qing-Hua Han,Jing-Fei Zhu,Jing-Heng Meng,Jin Dai,Hong-Bo Sun,Gui-Lei Wang,Yan-Zhe Tang,Hong-Wen Li,Wei-Feng Xu,Bryan Kang,Abraham Yoo,Kan-Yu Cao,Chao Zhao
DOI: https://doi.org/10.1109/icsict55466.2022.9963197
2022-01-01
Abstract:With continuous scaling-down of the DRAM technology node, the junctionless vertical gate all around device (JL-VGAA) becomes the mainstream transistor for 4F <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> DRAM cell. Simulating the JL-VGAA device using 3D-TCAD before wafer fab-out is indispensable for saving R&D cost. Here, we simulate the JL-VGAA performance based on the preliminary results of Su’s work [2]. Doping profile of JL-VGAA and diameter variation are the two key parameters affect its performance. Hence, we optimized the channel doping, after data normalization, the I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</inf> is simulated as 17.6, and the I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">off</inf> is 1.2×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-12</sup> . The ratio of I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">on</inf> and I <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">off</inf> is approximately 1.4×10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">13</sup> . In addition, the variation of V <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">th</inf> is around 10 mV nm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-1</sup> with low-level channel doping, which is excellent among other devices. Finally, the word line (WL) and bit line (BL) coupling capacitance were calculated. Overall, the total capacitance of JL-VGAA is less than the state of the art of emerging DRAM structure. Future research should further develop and confirm these initial findings by this paper.
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