A comparative study of self-heating effects in 3nm node GAAFETs and FinFETs

Pan Zhao,Song-Han Zhao,Yan-Dong He,Gang Du
DOI: https://doi.org/10.1109/icsict55466.2022.9963426
2022-01-01
Abstract:In this paper, the three-dimensional 3nm node transistors are calculated by electro-thermal coupling using the TCAD simulation platform, and the thermal response characteristics of FinFETs and GAAFETs are analyzed and compared using the three-dimensional finite element simulation software. Besides, the heat dissipation path of the device is analyzed to provide guidance for the subsequent research.
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