High Electron Mobility in Nearly-Dislocation-free Hexagonal InN

Ling Chen,Shanshan Sheng,Bowen Sheng,Tao Wang,Liuyun Yang,Baoqing Zhang,Jiajia Yang,Xiantong Zheng,Zhaoying Chen,Ping Wang,Weikun Ge,Bo Shen,Xinqiang Wang
DOI: https://doi.org/10.35848/1882-0786/ac4449
IF: 2.819
2022-01-01
Applied Physics Express
Abstract:We demonstrate a recorded directed-probed electron mobility of ∼4850 cm2 V−1s−1 in nearly-dislocation-free hexagonal InN at room temperature by Hall-effect measurement. Those extremely high-quality InN are achieved through droplet-assisted epitaxy on a GaN/sapphire template by molecular beam epitaxy. They behave as crystals with a diameter of several micrometers, being confirmed to be nearly free of threading dislocation by transmission electron microscopy. The achievement of such high-mobility InN provides promising opportunities for fabricating high-speed electronic devices.
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