Dielectric Constant Determination for Thin Film by Using Reflection Resonance Microstrip Line Method

Delun Zhou,Yong Zhang,Shengqi Shi,Jinyu Zhang,Ruifeng Yue,Yan Wang

DOI: https://doi.org/10.1109/tdei.2022.3146572

IF: 2.509

2022-01-01

IEEE Transactions on Dielectrics and Electrical Insulation

Abstract:In this article, we investigate the use of microstrip ring resonators for measuring substrate material’s dielectric constant. Our simulation and experiments demonstrate that when the dielectric thickness is as small as a few tens of microns, the electromagnetic (EM) wave is unable to resonate in the traditional microstrip ring; instead, it resonates in the microstrip line at the transmitting end, independent of the ring’s geometric size and shape. To demonstrate the new mode of resonance, GLC equivalent circuit is constructed and the microstrip ring resonator is implemented with copper as metal microstrip. Benzocyclobutene (BCB) material with a thickness of a few microns is used as the dielectric substrate. Dependable reflection coefficient is extracted to determine the dielectric constant of the substrate material. The error between the experiment result and the simulation result is less than 1%. Both simulation and experiments indicate that the dielectric constant of thin substrate materials can be obtained by our method.