Measurement based on twice cavity perturbations for permittivity of dielectric thin films

Shurong Dong,Hao Jin,Demiao Wang
2006-01-01
Abstract:A new and simple method based on cavity perturbation theory is presented in this paper, which is for measurement permittivity of dielectric thin films. Through rectangle resonator twice cavity perturbation, thin films permittivity can be obtained by measurement resonator frequency and calculating formula. Experiment results show that measurement precision is good, the measurement error of real permittivity is less than 7%. Some methods to improve measurement imaginary of permittivity is present by taking some calculating formula analyse.
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