Measurement of Complex Permittivity in Microwave Frequency of Thin Film Materials

Hao Jin,Demiao Wang,Shurong Dong
DOI: https://doi.org/10.3969/j.issn.1672-7126.2005.z1.006
2005-01-01
Abstract:A novel technique has been successfully developed, based on cavity perturbation, to measure the complex permittivity in microwave frequencies of various thin film materials. The technique was experimentally verified with a 0.81 μm thick ceramics film of MC-91 (BaO-(SmNdLa) 2O 3- Bi 2O 3-TiO 2) at a frequency of 2.4 GHz. The total relative error of the measurement was found to be less than 7%, of which 3% originates from the film thickness evaluation.
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