Measurement of microwave electromagnetic parameters of nanostructural magnetic films by using cavity perturbation

Jianjun Jiang,Jie Tao,Xiucheng Zhang,Huahui He
DOI: https://doi.org/10.3321/j.issn:1671-4512.2006.10.001
2006-01-01
Abstract:This research is based on the basic principle of measuring complex electromagnetic parameters of thin films.An automatic measurement system with virtual instrumentation consists of Vector Network Analyzer,personal computer and resonant cavities,was developed for electromagnetic parameters of thin films.A series of FeCo-based nanostructural thin films were measured in the automatic system by using cavity perturbation method.The effects of scattering parameters,such as the signal source frequencies,Q factor,nanostructural thicknesses,heat environment,and operation method,on the measurement results were analyzed.A schedule is proposed to improve cavity perturbation method.The results show that the measurement errors of complex permeability and complex permittivity are below 6% and 4%,respectively.
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