Microwave Frequency Performance and High Magnetic Anisotropy of Nanocrystalline Fe<SUB>70</SUB>Co<SUB>30</SUB>-B Films Prepared by Composition Gradient Sputtering
Shandong Li,Ming Liu,J. Lou,X. Xing,Jianpeng Wu,Yi Hu,Xinle Cai,Feng Xu,Nian X. Sun,Jenq-Gong Duh
DOI: https://doi.org/10.1166/jnn.2013.5973
2013-01-01
Journal of Nanoscience and Nanotechnology
Abstract:The fabrication and high-frequency ferromagnetic performances of nanocrystalline Fe70Co30-B soft magnetic films were investigated. It is revealed that the composition gradient sputtering method dramatically improves the high-frequency soft magnetic properties of the as-prepared films. This method gives rise to almost a linearly-increased distribution of compositions and residual stress. As a result, a very high ferromagnetic resonance frequency up to 6.7 GHz, high uniaxial magnetic anisotropic field up to 450 Oe, and low magnetic loss were obtained in as-deposited samples, which are particularly in favor of the integration between magnetic films and microwave components.