Effects of heavy ion irradiation on Cu/Al2O3/Pt CBRAM devices

Chaohui Su,Linbo Shan,Dongliang Yang,Yanfei Zhao,Yujun Fu,Jiande Liu,Guangan Zhang,Qi Wang,Deyan He
DOI: https://doi.org/10.1016/j.mee.2021.111600
IF: 2.3
2021-01-01
Microelectronic Engineering
Abstract:In this work, the effects of heavy ion irradiation on atomic switches with Cu/Al2O3/Pt structure are investigated. The initial device is prone to hard breakdown after forming, while the device after irradiation exhibits good performance such as stable operating voltage, non-volatile switching (a retention characteristic of 105 s at room temperature) and good endurance (2000 switching cycles). Compared with the device after low-dose irradiation, the device under higher-dose irradiation shows more uniform off-state resistances but no relevant changes were observed on distributions of on-state resistances, set and reset voltages.
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