Reconfigurable Logic-Memory Hybrid Device Based on Ferroelectric Hf0.5Zr0.5O2

Ruiting Zhao,Xiaoyue Zhao,Houfang Liu,Minghao Shao,Qixin Feng,Ting Liu,Tianqi Lu,Xiaoming Wu,Yang Yi,Tian-Ling Ren
DOI: https://doi.org/10.1109/led.2021.3089326
IF: 4.8157
2021-01-01
IEEE Electron Device Letters
Abstract:In this letter, we demonstrate a reconfigurable logic-memory hybrid device (R-LMHD), which can be dynamically and reversibly switched between the logic- and memory- mode. The logic-mode device exhibits a 2.5×10 6 ON/ OFF current ratio and nearly zero hysteresis, which indicates the weak influence of defects trapping and de-trapping. The memory-mode device shows a large memory window up to 2.19 V and the window maintains up to 1.44 V after 10 6 program/erase cycles. The excellent performance can be attributed to the high crystalline quality of ferroelectric Hf 0.5 Zr 0.5 O 2 (HZO) and the insertion of internal metal gate (IMG) between HZO and dielectric layer. Such R-LMHD features run-time tuning of threshold voltage and hysteresis, electrically reconfigurable. Furthermore, the subthreshold swing (SS) is electrically tunable with a minimum SS ( SS min ) of 35 mV/decade and a maintainability of sub-60 mV/decade about 3 orders. The R-LMHD provides a promising way to realize future in-memory computing and low power consumption applications.
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