Abstract:Sensing systems are becoming less and less invasive. In this context, flexible materials offer new opportunities that are impossible to achieve with bulky and rigid chips. Standard silicon sensors cannot be adapted to curved shapes and are susceptible to big deformations, thus discouraging their use in wearable applications. Another step forward toward minimising the impacts of the sensors can be to avoid the use of cables and connectors by exploiting wireless transmissions at ultra-high frequencies (UHFs). Thin-film bulk acoustic wave resonators (FBARs) represent the most promising choice among all of the piezoelectric microelectromechanical system (MEMS) resonators for the climbing of radio frequencies. Accordingly, the fabrication of FBARs on flexible and wearable substrates represents a strategic step toward obtaining a new generation of highly sensitive wireless sensors. In this work, we propose the design and fabrication of a flexible gravimetric sensor based on an FBAR on a polymeric substrate. The resonator presents one of the highest electromechanical coupling factors in the category of flexible AlN-based FBARs, equal to 6%. Moreover, thanks to the polymeric support layer, the presence of membranes can be avoided, which leads to a faster and cheaper fabrication process and higher robustness of the structure. The mass sensitivity of the device was evaluated, obtaining a promising value of 23.31 ppm/pg. We strongly believe that these results can pave the way to a new class of wearable MEMS sensors that exploit ultra-high-frequency (UHF) transmissions.

Research and Design of High Sensitivity FBAR Micro-mass Sensors

A Mass Sensor with High Sensitivity Based on Thin Film Bulk Acoustic Resonators

Modeling and analysis of localized biosensing and index sensing by introducing effective phase shift in microfiber Bragg grating (μFBG)

Processing chip for thin film bulk acoustic resonator mass sensor

FEM model and simulation effect of electrode shape on transverse coupling wave in FBAR sensor

Wireless Tiny Mass Sensor System Based On Fbar

Flexible magnetic sensor based on FBAR

Film Bulk Acoustic Resonator Nanosensors for Multi-Task Sensing

Progress of Research on the Thin-film Bulk Acoustic Resonator

Experimental Comparison of FBARs and SMRs Responsitivities to Mass Loadings

A Film Bulk Acoustic Liquid Concentration Sensor Integrated with Microchannel

Film Bulk Acoustic Resonators (fbars) As Biosensors: A Review

Electromagnetic analysis of thin film bulk acoustic resonator

Dual-mode Thin Film Bulk Acoustic Wave Resonators for Parallel Sensing of Temperature and Mass Loading

Design and Fabrication of a Flexible Gravimetric Sensor Based on a Thin-Film Bulk Acoustic Wave Resonator

Frequency perturbation integral for FBAR mass sensors and frequency shifts due to nonuniform mass layers

Bulk Acoustic Wave Resonator Based Wireless and Passive Pressure Sensor

A Single Fbar-Based Temperature and Pressure Sensors

Design and Optimization of a BAW Microphone Sensor

Simulation-Based Design and Optimization of Rectangular Micro-Cantilever-Based Aerosols Mass Sensor.

Design and simulation of Film Bulk Acoustic Wave Resonator (FBAR) Gas Sensor Based on ZnO Thin Film