Resistance change memory and preparation method thereof

Cai Yimao,Mao Jun,Wu Huiwei,Huang Ru
2013-01-01
Abstract:The embodiment of the invention discloses a resistance change memory and a preparation method thereof. The resistance change memory comprises a substrate and a plurality of memory units at intervals on the substrate; each memory unit comprises a lower electrode, a resistance change layer and an upper electrode; the lower electrode is positioned on the substrate; the resistance change layer is positioned on the lower electrode; the upper electrode is positioned on the resistance change layer; and the resistance change layer comprises a resistance change material part and at least one doped resistance change part doped with elements for adjusting a resistance state. The invention also discloses a preparation method for the resistance change memory. According to the resistance change memory and the preparation method thereof, the resistance change layer is not made of a single resistance change material, and a plurality of resistance states can be generated according to different voltage in the set operation process of a resistance changer, so that the memory density of the resistance changer is increased; and meanwhile, the size of the resistance changer is not required to be increased.
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