Resistive random-access memory (RRAM) and manufacturing method thereof

Yinglong Huang,Yimao Cai,Ru Huang,Yangyuan Wang
2012-01-01
Abstract:The invention discloses a resistive random-access memory (RRAM) and a manufacturing method thereof. The RRAM comprises a substrate, an upper electrode, a lower electrode and a resistance-change material positioned between the upper and lower electrodes, wherein the middle part of the lower electrode is upwardly protruded in a peak-like shape, while the upper electrode is flat, and the lower electrode in a peak structure is capable of reducing the power consumption of a device. The manufacturing method comprises the following steps: forming the peak structure on the surface of the substrate through corrosion; then growing the lower electrode on the peak structure to form a peak-like lower electrode; and then depositing the resistance-change material and the upper electrode. The whole manufacturing process is simple, and the high integrated level of the device can be realized.
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