High-consistency high-speed resistive random access memory (RRAM) and producing method thereof

Huang Ru,Yu Muxi,Cai Yimao,Wang Zongwei,Pan Yue,Fang Yichen,Li Ming
2013-01-01
Abstract:The invention relates to a high-consistency high-speed resistive random access memory (RRAM) and a producing method thereof. The resistive random access memory comprises a bottom electrode, a resistance changing material film and a top electrode, wherein the bottom electrode is arranged on a substrate, metal is doped in the resistance changing material film, and the doped metal simultaneously meets low thermal conductivity and high gibbs free energy; and corresponding doped metal is filled in the resistance changing material film by using an ion filling method. The doped metal in the invention simultaneously needs to meet two conditions: (1) the gibbs free energy of the doped metal corresponding to a metallic oxide and the gibbs free energy an oxide generated by oxygen reaction are lower than that corresponding to the mixing metal; and (2) the thermal conductivity of the doped metal and the thermal conductivity of the corresponding oxide are lower than that of the resistance changing material film. Through selecting a resistance changing material and a doped material which meet the conditions, the high-consistency high-speed resistive random access memory can be produced through using a common RRAM process, and the property of the resistive random access memory is preferably improved.
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