Ru-Based Oxide Resistive Random Access Memory For Beol-Compatible Novel Nvm Applications

Yulin Feng,Peng Huang,Zheng Zhou,Dongbin Zhu,Runze Han,Xiangxiang Ding,Lifeng Liu,Xiaoyan Liu,Jinfeng Kang
DOI: https://doi.org/10.1109/icsict.2018.8564908
2018-01-01
Abstract:CMOS-compatible character is a key aspect for RRAM to integrate into 1T1R structures. In this work, we constructed a Ru/AlOy/HfOx/TiN RRAM device by introducing Ru electrode to achieve the compatibility with CMOS technology. The device shows bipolar switching behavior with a high resistance on/off ratio (similar to 10(3)). Satisfactory pulse endurance (>10(6)) and high temperature retention (> 10(5)s @ 150 degrees C) were obtained. It is worth noting that a negative differential resistance effect is observed during the SET process, which could be attributed to current-induced RESET process of the weakly connected conductive filaments in the resistive layer. The construction of Ru-based RRAM structure provides a new avenue for the development of fully CMOS compatible non-volatile memories.
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