Design And Fabrication Of 3d Interconnected Transmission Structure Based On Tsv

Yunheng Sun,Yufeng Jin,Tingting Lian,Jiwei Li,Shenglin Ma,Yuchi Yang,Wei Wang,Jing Chen,Shuwei He,Liulin Hu
DOI: https://doi.org/10.1109/ICMMT49418.2020.9386718
2020-01-01
Abstract:In this paper, we design and fabricate a radio frequency (RF) signal transmission structure for a 3D stacked structure. Usually, this structure uses co-planar waveguide (CPW) and Through Silicon Via (TSV) to realize the horizontal and vertical RF signal transmission on the same interposer respectively. With the help of micro-bump, we can transport RF signal in a stacked structure. Furtherly, we design and fabricate a patch antenna with a stacked structure, fed by the structure we proposed. Through the measurement of the antenna, we determine the effectiveness of this transmission structure.
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