Investigation of Bismuth Doped Indium-Zinc-Oxide Thin Film Transistors

Shubin PI,Jianwen YANG,Yanbing HAN,Qun ZHANG
DOI: https://doi.org/10.15943/j.cnki.fdxb-jns.2017.03.006
2017-01-01
Abstract:Amorphous bismuth doped indium zinc oxide thin film transistors (a-IZBO-TFTs) were prepared by rf magnetron sputtering at room temperature.Compared with the intrinsic indium zinc oxide TFTs,a-IZBO-TFTs show lower off-current and positive turn-on voltage shift.The optimum a-IZBO-TFT performance in enhancement mode was obtained at Bi doping content of 8.6%,with the mobility of 7.5 cm2/(V · s),on/off current ratio of 3× 108,and subthreshold swing of 0.41 V/decade.PL spectra as well as XPS spectra were used to evaluate the oxygen vacancy defects in the a-IZBO channel layers.It is found that Bi doping is effective on suppressing the oxygen vacancies and thus the carrier concentration and improving the comprehensive electrical performance of IZO-TFT devices.
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