Comprehensive Study of Improved Negative-Bias-Illumination-Temperature Stress Stability in Terbium-Doped Indium-Zinc-Oxide Thin-Film Transistors

Jingdong Liu,Hua Xu,Min Li,Miao Xu,Junbiao Peng
DOI: https://doi.org/10.1109/ted.2023.3273511
IF: 3.1
2023-01-01
IEEE Transactions on Electron Devices
Abstract:In this study, the explanation of the enhanced negative-bias-illumination-temperature stress stability (NBITS) of indium-zinc-oxide thin-film transistors (IZO TFTs) under terbium (Tb) doping is addressed. The acquired Tb-IZO TFTs exhibit enhanced stability compared with pristine device ( $Delta extit{V}_{ ext{th}}$ after NBITS decreased from $-$ 4.1 to $-$ 0.6 V). Hall measurements, X-ray photoelectron spectroscopy, and microwave photoconductivity decay were used to analyze the impact of Tb doping on the characteristics of metal–oxide–semiconductor films. It is believed that Tb-induced shallow defects may serve as the recombination centers for capturing photo-generated electrons, which is an essential complement to the trap-assisted model. The optimized Tb content is considered to be 3.21 at.%, with a mobility of 20.0 cm $^{ ext{2}}$ /V $cdot$ s, $ extit{I}_{iosc{on}}$ / $ extit{I}_{iosc{off}}$ ratio of 10 $^{ ext{9}}$ , and an NBITS of $-$ 0.8 V.
engineering, electrical & electronic,physics, applied
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