Research on Surface Polishing and Corrosion of InSb Chip

Sheng GUO,Sishu XIN,Xiaoxia GONG,Jun YUAN,Jie GUO
2018-01-01
Abstract:Surface polishing and etching are important processes in the manufacturing of InSb infrared focal plane detector chip. In this study, the problems of surface roughness, pitting corrosion, and bright spot after polishing are discussed. In addition, analysis of the influences of pressure, speed, ratio of polishing material, and dropping speed on the appearance of InSb are reported. It was found that when the pressure is less than 4.5 N, the speed is less than 80 r/min, the ratio of polishing material is 1:1, the dropping speed is less than 1 drops/s or the oxidant H2O2is added, the "bright spot" on the surface of the InSb chip gets effectively resolved. The developed AB etching solution was used to etch the polished material and remove the damaged layer. After processing, the surface of InSb chip was bright and smooth. I-Vcurve showed that the dark current decreased enormously.TheR0Awas 8.16×102Ω·cm2·cm2and the blackbody detection D*was 3.1×1010cm·Hz1/2·W-1.
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