Physical Model for Ionizing Radiation Damage in Partially Depleted SOI Transistors

Baoping HE,Minbo LIU,Zujun WANG,Zhibin YAO,Shaoyan HUANG,Jiangkun SHENG,Zhigang XIAO
DOI: https://doi.org/10.19596/j.cnki.1001-246x.2015.02.012
2015-01-01
Abstract:For physical process of holes trapped in oxide and interface trap buildup induced by proton, physical models of oxide trapped charge and interface trap charge in partially depleted SOI transistors after ionizing radiation exposure are proposed. Relations between oxide trapped charge density or interface trap charge density and radiation dose are described well. These models are validated by radiation experiments. It shows that within confines of experimental dose, oxide trapped charge density induced by radiation rays depends negative exponential on radiation dose. Results for high total dose as annealing is taken into account exhibits excellent agreement with experimental data. Interface trap charge density induced by radiation rays is linear in dose within confines of experimental dose.
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