A trimming method for MEMS gyroscopes by focused ion beam etching

Liu,Yuhang,Zhou,Bin,Zhang,Rong,Zhang,Ruixue

DOI: https://doi.org/10.13695/j.cnki.12-1222/o3.2014.05.020

2014-01-01

Abstract:Due to deficiency in micro-machining processes, the structural parameters of MEMS sensors are usually deviated from their designed values and failed to meet the requirement of high-precision applications. In order to suppress the fabrication errors of MEMS gyroscopes, their primary modes of motions and the sources of coupling errors were analyzed. A trimming method by FIB etching on gyro’s folded-beams was also developed. Moreover, the performance tests of gyroscopes before and after trimming were conducted. Test results show that the zero-rate outputs were reduced by 35% and 72%, while the bias’ stability over temperature were increased by 80%and 55%respectively, after trimmed by two FIB etching strategies, which confirm the effectiveness of FIB trimming in suppressing the errors and improving the performance of gyroscopes.