Abstract:The mode coupling is a major factor to affect the precision of the micro electromechanical systems（MEMS） gyroscope. Currently, many MEMS gyroscopes with separate oscillation modes for drive and detection have been developed to decrease the mode coupling, but the gyroscope accuracy can not satisfy the high-precision demand well. Therefore, high performance decoupled MEMS gyroscopes is still a hot topic at present. An innovative design scheme for a MEMS gyroscope is designed, and in this design, the inertial mass is divided into three parts including the inner mass, the outer mass and the main frame mass. The masses are supported and separated by a set of mutually orthogonal beams to decouple their movements. Moreover, the design is modelled by multi-port-element network（MuPEN） method and the simulation results show that the mode coupling of the gyroscope between driving and sensing mode was eliminated effectively. Furthermore, we proposed a new silicon-on-insulator（SOI） process to fabricate the gyroscope. The scale factor of the fabricated gyroscope is 8.9 mV/（（o）?s） and the quality factor（Q-factor） is as high as 600 at atmosphere pressure, and then, the resonant frequency, scale factor and bias drift has been test. Process and test results show that the proposed MEMS gyroscope are effective for decrease mode coupling, furthermore, it can achieve a high performance at atmosphere pressure. Furthermore, the MEMS gyroscope can achieve a high performance at atmosphere pressure. The research can be taken as good advice for the design and fabrication of MEMS gyroscope, meanwhile, it also provides technical support for speeding up of MEMS gyroscope industrialization.

Initial Frequency Split Reduction of MEMS Ring Gyroscope Based on Cascaded Springs Geometrical Compensation

Effects of Structural Dimension Variation on the Vibration of MEMS Ring-Based Gyroscopes

GEOMETRIC COMPENSATION OF (100) SCS VIBRATING RING GYROSCOPE FOR MODE-MATCHING ACHIEVING HIGH IMMUNITY TO FABRICATION IMPERFECTIONS

Effects of Non-Ideal Frequency Splits on Linear Parametric Resonance in MEMS Mode-Split Gyroscopes

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes

An In-Run Automatic Mode-Matching Method With Amplitude Correction and Phase Compensation for MEMS Disk Resonator Gyroscope

A Micro-Machined Silicon Vibrating Ring Gyroscope

A Low-Complexity In-Run Modal Frequency Tuning Method for MEMS Disk Gyroscopes Without Gain Calibration and Phase Shifting

Geometrical compensation for mode-matching of a (100) silicon ring resonator for a vibratory gyroscope

Stiffness Imbalance Errors Trimming for Silicon Mems Tuning-Fork Gyroscopes with Low Cost Picosecond Lasers

Design and Fabrication of MEMS Gyroscopes on the Silicon-on-insulator Substrate with Decoupled Oscillation Modes

An 8PPM/°C Temperature Sensitivity of the Scale Factor in MEMS Gyroscope Based on Multi Parameters Fusion Compensation Method

Interactive Errors Analysis and Scale Factor Nonlinearity Reduction Methods for Lissajous Frequency Modulated MEMS Gyroscope

A High-Performance Tactical-Grade Monolithic Horizontal Dual-Axis MEMS Gyroscope with Off-Plane Coupling Suppression Silicon Gratings

Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification

Bandwidth optimization design of a multi degree of freedom MEMS gyroscope

Achieving Sub-5 Mhz Frequency Split Trimming of Micro Hemispherical Resonator Gyroscope with Method of Mass-stiffness Decoupling