Trimming method for MEMS gyroscope by femtosecond laser

Liu,YuHang,Liu,HaiPing,Zheng,HengYu,Liu,JingYong,Chen,ZhiYong,Zhang,Rong

DOI: https://doi.org/10.13695/j.cnki.12-1222/o3.2017.02.023

2017-01-01

Abstract:The micro-fabricated MEMS gyroscopes usually do not meet the high-precision application requirements due to the precision limits in micro-fabrication processes.In order to eliminate the fabrication defects,the motion modes and the error coupling mechanisms of the sensing element of a MEMS gyroscope are studied and analyzed,and a trimming method by femto-second laser etching on folded-beam structures is proposed to realize the high-quality etching process.The fabrication system is built based on the femtosecond laser,which integrates a series of units and their control system.Dynamic test results show that,after etched by laser pulses,the coupling error coefficient is reduced by more than 50％,and the error's stability is improved by nearly 70％,which prove the feasibility and effectiveness of the proposed trimming method in suppressing the fabrication errors and improving the gyroscope's performance.