Characterization of Sputtered MoOx Thin Films with Different Oxygen Content and Their Application As Back Contact in CdTe Solar Cells

Fan He,Xiaohan Yin,Jingmei Li,Sen Lin,Lili Wu,Xia Hao,Jingquan Zhang,Lianghuan Feng
DOI: https://doi.org/10.1016/j.vacuum.2020.109337
IF: 4
2020-01-01
Vacuum
Abstract:Transparent MoOx thin films with varied composition were successfully prepared by sputtering and the effects of oxygen contents on the composition stoichiometry, defect states, work functions, electrical and optical properties of MoOx films were systematically studied. These thin films were then utilized in cadmium telluride solar cells to act as back contact buffers. As compared with the CdTe solar cells with Au back contact, deteriorated performance was witnessed in those with MoOx buffers. The deterioration was demonstrated to be caused by the oxidation of CdTe surface, the large valence band offset and the insufficient work function. Finally, by optimizing the back contacts to form a CuCl/MoOx/ITO composite back contact, the efficiency was improved to 11.8%. This work demonstrates feasible approaches to prepare MoOx thin films with varied oxygen concentrations which could be easily applied to many other thin film solar cells and provide important indications in the preparation and optimization of the performance for bifacial devices.
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