Advanced RMG module to improve AC/DC performance for 14nm FinFETs and beyond
J. Lian,M. Joshi,S. Pandey,M. Nam,H. Meer,X. Zhang,C. Yong,E. Banghart,Y. Liu,D. Konduparthi,S. Samavedam,B. Liu,A. Wei,R. Carter,W. Tong,D. Triyoso,M. Togo,X. Wu,S. Mun,C. Xiao,R. Pal,X. He,G. Bohra,M. Eller
DOI: https://doi.org/10.1109/VLSIT.2014.6894392
2014-06-09
Abstract:An advanced Replacement Metal Gate (RMG) module was developed for 14nm node FinFETs and beyond. STI oxide extra recess increases on-current without any dedicated Source and Drain (SD) optimization. Tungsten (W) selective etch recesses work function metal (WFM), which reduces gate-contact capacitance, and improves AC performance and yields by increasing gate-contact space. Combination of work function (WF) adjust treatment and WFM optimization was applied to achieve wide range of threshold voltage (Vt) control for multiple Vt (multi-Vt) devices without any performance penalty.
Engineering,Materials Science