Study of Internal Latchup Behaviors in Advanced Bulk FinFET Technology

Wei Liang,Robert Gauthier,Souvick Mitra,You Li,Chen Yan
DOI: https://doi.org/10.1109/ipfa47161.2019.8984897
2019-01-01
Abstract:In this paper, Internal Latchup (ILU) behaviors are studied in an advanced bulk FinFET technology. The methodology of the ILU development and characterization are introduced and the ILU characteristics of thin oxide (SG) and thick oxide (EG) victim devices are discussed comprehensively. Comparison between 7nm and 14nm Bulk FinFET technology has been made on ILU characteristics.
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