Abstract:On-chip micro-ring resonators (MRRs) with low propagation loss have the potential to revolutionize numerous fields, including microwave photonic filters, optoelectronic oscillators, on-chip soliton micro combs, and Brillouin lasers [1–2]. Silicon nitride (Si <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> ) is an excellent photonic platform due to its wide transparency range, relatively high refractive index, compatibility in large-scale semiconductor manufacturing, and ultra-low loss [3–4]. Although high-quality factor (Q) resonators have been demonstrated in low confinement Si <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> waveguides, they rely on a large mode volume, weak constraints, and millimeter-scale bending radii [5]. For the high confinement Si <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</inf> N <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">4</inf> waveguides, such as the photonic Damascene reflow process, which needs “preform reflow” and substrate annealing to reduce waveguide sidewall roughness and absorption loss [6].

Design and fabrication of high-Q silicon micro-resonators

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Concentric Silicon Micro-Ring Resonators with Enhanced Transmission Notch Depth

Fabrication of high-Q microresonators in dielectric materials using a femtosecond laser: Principle and applications

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Ultra-High-Quality Factor Micro-Ring Resonator Based on Silicon Nitride

Design and demonstration of ultra-high-Q silicon microring resonator based on a multi-mode ridge waveguide.

High-Q Microring Resonators with 2$\,\times\,$ 2 Angled Multimode Interference Couplers

Mutual-Coupling in High-Q Silicon Dual-Concentric Micro-Ring/Racetrack Resonator

High-Q-Factor Tunable Silica-Based Microring Resonators

Dry-etched Ultrahigh-Q Silica Microdisk Resonators on a Silicon Chip

Optimisation Design Of Coupling Region Based On Soi Micro-Ring Resonator

Quality Factor of Silicon-on-insulator Integrated Optical Ring Resonator

Compact multimode silicon-nitride waveguide micro-ring resonator with high-Q

Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Silicon Micro-Cavities And Their System Applications

High Q single crystal silicon micromechanical resonators with hybrid etching process

Research on Soi-Based Micro-Resonator Devices