Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Dense Wavelength Conversion and Multicasting in a Resonance-Split Silicon Microring

4H-Sic Microring Resonators for Nonlinear Integrated Photonics.

Silicon Micro-Cavities And Their System Applications

Ultrahigh-Q AlGaAs-on-insulator Microresonators for Integrated Nonlinear Photonics.

Low-loss Silicon Nitride Waveguides and High-Q Microring Resonators at 2-Μm Wavelength

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

Ultra High Optical Nonreciprocity Using Silicon Microring Resonators

Micrometer-scale Optical Up-Converter Using a Resonance-Split Silicon Microring Resonator in Radio over Fiber Systems

Optical Frequency Comb in Silicon Nitride Microresonator(invited)

Ultralow-Loss Silicon Photonics beyond the Singlemode Regime

High-quality Factor, High-Confinement Microring Resonators in 4H-Silicon Carbide-on-insulator

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Design and fabrication of high-Q silicon micro-resonators

Ultra-high-Q racetrack microring based on silicon-nitride

An Ultrahigh-Q Microresonator on 4H-silicon-carbide-on-insulator Platform for Multiple Harmonics, Cascaded Raman Lasing and Kerr Comb Generations

Ultra-High-Quality Factor Micro-Ring Resonator Based on Silicon Nitride

Fabrication of the High-Q Si 3 N 4 Microresonators for Soliton Microcombs

Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator