First Demonstration of a Self-Aligned P-Channel GaN Back Gate Injection Transistor
Yingjie Wang,Sen Huang,Qimeng Jiang,Jiaolong Liu,Xinhua Wang,Wen Liu,Liu Wang,Jingyuan Shi,Jie Fan,Xinguo Gao,Haibo Yin,Ke Wei,Xinyu Liu
DOI: https://doi.org/10.1088/1674-4926/24050027
2024-01-01
Journal of Semiconductors
Abstract:In this study, we present the development of self-aligned p-channel Ga N back gate injection transistors(SA-BGITs)that exhibit a high ON-state current. This achievement is primarily attributed to the conductivity modulation effect of the 2-D electron gas(2DEG, the back gate) beneath the 2-D hole gas(2DHG) channel. SA-BGITs with a gate length of 1 μm have achieved an impressive peak drain current(I D,MAX ) of 9.9 m A/mm. The fabricated SA-BGITs also possess a threshold voltage of 0.15 V, an exceptionally minimal threshold hysteresis of 0.2 V, a high switching ratio of 10~7, and a reduced ON-resistance(RON)of 548 Ω·mm. Additionally, the SA-BGITs exhibit a steep sub-threshold swing(SS) of 173 mV/dec, further highlighting their suitability for integration into Ga N logic circuits.