Abstract:Using the complex image method (CIM), we have analyzed the frequency and temperature dependencies of substrate eddy currents for single-ended and differential spiral inductors on a lossy silicon substrate. From our analysis, we have derived a set of accurate closed-form expressions for calculating inductances and substrate losses due to substrate eddy currents. Here, we propose a frequency-dependent eleven-element equivalent circuit model based on these formulas. We established the validity of the model by comparing the simulated and measured results, which are in good agreement. Index Terms—Complex image method (CIM), differential inductor, eddy currents, greenhouse algorithm, inductor model. HE high operating frequencies, at which deep submicrom- eter and nano-scale CMOS devices are able to operate, have brought radio-frequency integrated circuits (RFICs) in the realm of CMOS making the quality factor of the on-chip spiral inductors a focus of intense research. The quality factor of the on-chip inductor is limited by the losses due to the finite conduc- tivity of the metal and the conducting silicon substrate. Non-per- fect metal wires used to form spiral inductors cause ohmic loss due to the non-zero resistance at low frequencies. Additionally the non-uniform current distribution in metal wires at high fre- quencies increases the losses and degrades the quality factor of inductors. This loss mechanism has been extensively studied as skin- and proximity-effect (1)-(12).

A STUDY OF INDUCTOR AND ITS MODEL IN SIGE BICMOS PROCESS

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

A derived circuit model for spiral inductors on lossy silicon substrate

A Compact Circuit Model of On-Chip Multi-layer Spiral Inductors on Silicon Substrate

Model Description and Parameter Extraction of On-Chip Spiral Inductors for MMICs

Analysis of Frequency- and Temperature-Dependent Substrate Eddy Currents in On-Chip Spiral Inductors Using the Complex Image Method

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

Comparative Characteristics of On-Chip Single- and Double-Level Square Inductors

Global Performance Evaluation of Various On-Chip Square Spiral Inductors on Gaas Substrates

Quasi-Static Derived Physically Expressive Circuit Model for Lossy Integrated RF Passives

Electrical Characteristics and Behavioral Model of Spiral Inductors On Gaas Substrate

A Physics-Aware Methodology for Equivalent Circuit Model Extraction of TSV-inductors

Design and Simulation of Si-Based MEMS Inductor

A Scalable Model of On-chip Inductor Including Tunable Dummy Metal Density Factor

Design Optimization and Modeling of On-Chip RF Inductors in 0.13&#x00b5;m and 90nm Standard CMOS

Accurate Model for Micromachined Microwave Planar Spiral Inductors

A Study of Advanced Modeling Methodology of CMOS-compatible RF-MEMS Devices for Integrated Circuit Design

Physical Models of Planar Spiral Inductor Integrated on the High-Resistivity and Trap-Rich Silicon-on-Insulator Substrates

Substrate engineering of inductors on SOI for improvement of Q-factor and application in LNA

High-Q Integrated Inductor Using Post-Cmos Selectively Grown Porous Silicon (sgps) Technique for Rfic Applications

Model and Fabrication of Integrated Micro-Inductors Based on Ceramic Substrate