Abstract:RF-MEMS technology has evolved significantly over the years, during which various attempts have been made to tailor such devices for extreme performance by leveraging novel designs and fabrication processes, as well as integrating unique materials; however, their design optimization aspect has remained less explored. In this work, we report a computationally efficient generic design optimization methodology for RF-MEMS passive devices based on multi-objective heuristic optimization techniques, which, to the best of our knowledge, stands out as the first approach offering applicability to different RF-MEMS passives, as opposed to being customized for a single, specific component. In order to comprehensively optimize the design, both electrical and mechanical aspects of RF-MEMS device design are modeled carefully, using coupled finite element analysis (FEA). The proposed approach first generates a dataset, efficiently spanning the entire design space, based on FEA models. By coupling this dataset with machine-learning-based regression tools, we then generate surrogate models describing the output behavior of an RF-MEMS device for a given set of input variables. Finally, the developed surrogate models are subjected to a genetic algorithm-based optimizer, in order to extract the optimized device parameters. The proposed approach is validated for two case studies including RF-MEMS inductors and electrostatic switches, in which the multiple design objectives are optimized simultaneously. Moreover, the degree of conflict among various design objectives of the selected devices is studied, and corresponding sets of optimal trade-offs (pareto fronts) are extracted successfully.

A Study of Advanced Modeling Methodology of CMOS-compatible RF-MEMS Devices for Integrated Circuit Design

Research Status of Macro-Modeling of MEMS Devices for Systems Level Simulations

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

An Improved RF MOSFET Model Accounting Substrate Coupling among Terminals

Physical design optimization of MOSFETs for millimeter wave and sub-millimeter wave circuits

Modeling and Optimization of Substrate Electromagnetic Coupling and Isolation in Modern Lightly Doped CMOS Substrate

Design and Simulation of Si-Based MEMS Inductor

A new method of modeling for RF MEMS distributed transmission line

The key technologies in silicon based microwave and RF MEMS device fabrication

Design Optimization and Modeling of On-Chip RF Inductors in 0.13&#x00b5;m and 90nm Standard CMOS

Device modeling of superconductor transition edge sensors based on the two-fluid theory

A Novel Integrated Approach for Simulation of Electromagnetic Susceptibility Problem

Advanced MOSFET Modeling for RF IC Design

Machine Learning-Based Modeling and Generic Design Optimization Methodology for Radio-Frequency Microelectromechanical Devices

Development of a MEMS/IC Design Environment for RFIC Applications

Simple and fast modelling of radio frequency passives in view of beyond-5G and 6G applications: case study of an RF-MEMS multi-state network described by an equivalent lumped element network

Complex Shaped On-Wafer Interconnects Modeling for CMOS RFICs

RF MEMS-CMOS Device Integration: An Overview of the Potential for RF Researchers

RF CMOS is More Than CMOS: Modeling of RF Passive Components

MOSFET Modeling for RF IC Design

A New Modeling Technique For Simulating 3-D Arbitrary Conductor Magnet Structures For Rfic Applications