Abstract:Using the complex image method (CIM), we have analyzed the frequency and temperature dependencies of substrate eddy currents for single-ended and differential spiral inductors on a lossy silicon substrate. From our analysis, we have derived a set of accurate closed-form expressions for calculating inductances and substrate losses due to substrate eddy currents. Here, we propose a frequency-dependent eleven-element equivalent circuit model based on these formulas. We established the validity of the model by comparing the simulated and measured results, which are in good agreement. Index Terms—Complex image method (CIM), differential inductor, eddy currents, greenhouse algorithm, inductor model. HE high operating frequencies, at which deep submicrom- eter and nano-scale CMOS devices are able to operate, have brought radio-frequency integrated circuits (RFICs) in the realm of CMOS making the quality factor of the on-chip spiral inductors a focus of intense research. The quality factor of the on-chip inductor is limited by the losses due to the finite conduc- tivity of the metal and the conducting silicon substrate. Non-per- fect metal wires used to form spiral inductors cause ohmic loss due to the non-zero resistance at low frequencies. Additionally the non-uniform current distribution in metal wires at high fre- quencies increases the losses and degrades the quality factor of inductors. This loss mechanism has been extensively studied as skin- and proximity-effect (1)-(12).

Model and Fabrication of Integrated Micro-Inductors Based on Ceramic Substrate

Integrated inductors on silicon and planarized ceramic substrates

A Compact Circuit Model of On-Chip Multi-layer Spiral Inductors on Silicon Substrate

A derived circuit model for spiral inductors on lossy silicon substrate

Asic Design of an Integrable Simulated Inductor with Huge Inductance

Modelling On-Chip Circular Double-Spiral Stacked Inductors for RFICs

Comparative Characteristics of On-Chip Single- and Double-Level Square Inductors

Experimental Characterisation Of On-Chip Octagonal Double-Helix Inductors On Silicon Substrates

Model Description and Parameter Extraction of On-Chip Spiral Inductors for MMICs

Analysis of Frequency- and Temperature-Dependent Substrate Eddy Currents in On-Chip Spiral Inductors Using the Complex Image Method

Electromagnetic-Thermal Analysis for Inductances and Eddy Current Losses of On-chip Spiral Inductors on Lossy Silicon Substrate

Compact Equivalent Circuit Model Of Two-Layer Spiral Inductors

The design and fabrication of LTCC chip inductors for high frequency applications based on barium ferrites

Physical Models of Planar Spiral Inductor Integrated on the High-Resistivity and Trap-Rich Silicon-on-Insulator Substrates

Design and Simulation of Si-Based MEMS Inductor

Accurate Model for Micromachined Microwave Planar Spiral Inductors

On-Chip Integrated Inductors with Ferrite Thin-Films for RF IC

Magnetic film inductors for RF IC

On-Chip Integrated Inductors with Ni-Zn-Cu-Fe and Y-Bi-Fe Ferrite Thin-films for RF IC

Small-Resistance And High-Quality-Factor Magnetic Integrated Inductors On Pcb

Method of Calculating the Inductance Value of MEMS Suspended Inductors with Silicon Substrates