Investigation of Nitridation on the Band Alignment at MoS2/HfO2 Interfaces

Ya-Wei Huan,Wen-Jun Liu,Xiao-Bing Tang,Xiao-Yong Xue,Xiao-Lei Wang,Qing-Qing Sun,Shi-Jin Ding
DOI: https://doi.org/10.1186/s11671-019-3020-0
2019-01-01
Nanoscale Research Letters
Abstract:The effect of nitridation treatment on the band alignment between few-layer MoS2 and HfO2 has been investigated by X-ray photoelectron spectroscopy. The valence (conduction) band offsets of MoS2/HfO2 with and without nitridation treatment were determined to be 2.09 ± 0.1 (2.41 ± 0.1) and 2.34 ± 0.1 (2.16 ± 0.1) eV, respectively. The tunable band alignment could be attributed to the Mo-N bonding formation and surface band bending for HfO2 triggered by nitridation. This study on the energy band engineering of MoS2/HfO2 heterojunctions may also be extended to other high-k dielectrics for integrating with two-dimensional materials to design and optimize their electronic devices.
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