Abstract:Focal plane array (FPA) detector has characteristics of low cost, operating at room temperature, compatibility with the silicon CMOS technology and high detecting performance, therefore it becomes a hot spot in infrared (IR) or terahertz (THz) detect field recently. However, the tradition structure of micro-bolometer has the conflict of the pixel size and thermal performance. In order to improve the detecting performance of small pixel size bolometer, high fill factor and low thermal conductance design should be considered. In IR detecting, double layers structure is an efficient method to improve the absorption of micro-bolometer and reduce thermal conductance. The three dimension model of small size micro-bolometer was built in this article. The thermal and mechanical characters of those models were simulated and optimized, and finally the double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes on the readout integrated chip wafer. For THz detecting, to improve the detecting performance, different dimension THz detectors based on micro-bridge structure were designed and fabricated to get optimizing micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer to enhance the absorption of THz radiation. Continuous-wave THz detection and imaging are demonstrated with a 2.52 THz far infrared CO2 laser and fabricated 320x240 vanadium oxide micro-bolometer focal plane array with optimized cell structure. With this detecting system, THz imaging of metal concealed in wiping cloth and envelope is demonstrated.

The Impact of Flip-chip Process on Nb5N6 Microbolometer Arrays for Terahertz Detection

Flip-chip Interconnection Between Nb5N6 Terahertz Array Detectors and Readout Circuits

Nb5n6 Microbolometer Terahertz Array Detection Chips

Size Effect on the Performance of Nb5N6 Bolometer for THz Detection

1 × 64 Nb5N6 Microbolometer Array Detector for Real Time THz Imaging

The Effect of Infrared Plasmon on the Performance of Si-based THz Detectors

Nb5n6 Microbolometer Array for A Compact Thz Imaging System

Nb5 N6 Microbolometer for THz Detection

Design of Double-Slot Antennas for Terahertz Array Detectors in Flip Chip Packaging.

Performance Improvements of a Terahertz Direct Detector for Imaging Arrays

Antenna-coupled Uncooled Nb5N6microbolometers for Terahertz Imaging

Diffractive microlens integrated into Nb 5 N 6 microbolometers for THz detection

Effects of Stoichiometric Ratio of NbN Films on the Performance of Hot Electron Bolometer Direct Detection

Detection Of Terahertz Radiation Using Improved Uncooled Focal Plane Array Detector

Low-Noise Readout Integrated Circuit for Terahertz Array Detector

Focal Plane Array Detectors With Micro-Bolometer Structure And Its Application In Ir And Thz Imaging

Characterizations of Diffractive Microlens in Nb5N6microbolometers Array for THz Detection

Investigation of antenna-coupled Nb5N6 microbolometer THz detector with substrate resonant cavity

Planar Double-Slot Antenna Integrated into a Nb5N6 Microbolometer THz Detector.

Nb5N6 microbolometers integrated with diffractive lens for THz imaging

A Low Noise Readout Integrated Circuit for Nb5n6 Microbolometer Array Detector