Abstract:Focal plane array (FPA) detector has characteristics of low cost, operating at room temperature, compatibility with the silicon CMOS technology and high detecting performance, therefore it becomes a hot spot in infrared (IR) or terahertz (THz) detect field recently. However, the tradition structure of micro-bolometer has the conflict of the pixel size and thermal performance. In order to improve the detecting performance of small pixel size bolometer, high fill factor and low thermal conductance design should be considered. In IR detecting, double layers structure is an efficient method to improve the absorption of micro-bolometer and reduce thermal conductance. The three dimension model of small size micro-bolometer was built in this article. The thermal and mechanical characters of those models were simulated and optimized, and finally the double layer structure micro-bolometer was fabricated with multifarious semiconductor recipes on the readout integrated chip wafer. For THz detecting, to improve the detecting performance, different dimension THz detectors based on micro-bridge structure were designed and fabricated to get optimizing micro-bolometer parameters from the test results of membrane deformation. A nanostructured titanium thin film absorber is integrated in the micro-bridge structure of the VOx micro-bolometer to enhance the absorption of THz radiation. Continuous-wave THz detection and imaging are demonstrated with a 2.52 THz far infrared CO2 laser and fabricated 320x240 vanadium oxide micro-bolometer focal plane array with optimized cell structure. With this detecting system, THz imaging of metal concealed in wiping cloth and envelope is demonstrated.

Nb5n6 Microbolometer Array for A Compact Thz Imaging System

1 × 64 Nb5N6 Microbolometer Array Detector for Real Time THz Imaging

Nb5n6 Microbolometer Terahertz Array Detection Chips

Nb5 N6 Microbolometer for THz Detection

Antenna-coupled Uncooled Nb5N6microbolometers for Terahertz Imaging

Nb5N6 microbolometers integrated with diffractive lens for THz imaging

An Nb5N6 Microbolometer THz Camera

Quasioptical Terahertz Detector Based on the Series Connection of Nb5n6 Microbolometers

Diffractive microlens integrated into Nb 5 N 6 microbolometers for THz detection

Characterizations of Diffractive Microlens in Nb5N6microbolometers Array for THz Detection

Antenna-coupled Microbolometer Array for Terahertz Detection

Size Effect on the Performance of Nb5N6 Bolometer for THz Detection

Planar Double-Slot Antenna Integrated into a Nb5N6 Microbolometer THz Detector.

Detection Of Terahertz Radiation Using Improved Uncooled Focal Plane Array Detector

Terahertz real-time imaging uncooled array based on antenna- and cavity-coupled bolometers

Focal Plane Array Detectors With Micro-Bolometer Structure And Its Application In Ir And Thz Imaging

A Hybrid Antenna Coupled Nb&lt;sub&gt;5&lt;/sub&gt;N&lt;sub&gt;6&lt;/sub&gt; Microbolometer for Dual Polarization THz Detection

Enhancement of Real-Time THz Imaging System Based on 320 × 240 Uncooled Microbolometer Detector

A 0.6 THz quasi-optical detector based on a room microbolometer

The Design of Nb5N6 micro-bolometer for 0.3 THz Detector

Investigation of antenna-coupled Nb5N6 microbolometer THz detector with substrate resonant cavity