Antenna-coupled Microbolometer Array for Terahertz Detection

X. C. Tu,L. Kang,X. H. Liu,Q. K. Mao,C. Wan,J. Chen,B. B. Jin,Z. M. Ji,W. W. Xu,P. H. Wu
DOI: https://doi.org/10.1109/irmmw-thz.2012.6380449
2012-01-01
Abstract:A novel room-temperature microbolometer for terahertz wave is described in this paper. Each microbolometer in the array consists of a Nb5N6 thin film microbridge and a dipole planar antenna. Such antenna-coupled microbolometer behaves very well for detecting signals from 0.2 THz to 0.32 THz, thanks to the fact that the temperature coefficient of resistance of the Nb5N6 thin film is as high as -0.7% K-1. The DC responsivity, calculated from the measured I-V curve, of the microbolometer is about 730 V/W at the bias current of 0.4 mA. A typically noise voltage as low as 10 nV/√Hz lead to a low noise equivalent power (NEP) of 1.5 × 10-11 W/√Hz for modulation frequencies above 4 kHz. The RF responsivity and corresponding NEP are experimentally shown to be 550 V/W and 2 × 10-11 W/√Hz, respectively, at 4 kHz for 0.27 THz detecting.
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