Abstract:Fabricating resonant cavities with conventional methods to improve the coupling efficiency of a detector in the terahertz (THz) region is difficult for the wavelength is too long. Here, we propose a solution by using the substrate cavity effect given that the substrate wavelength and thickness of the preparation device are in the same order. The planar dipole antenna-coupled Nb5N6 microbolometers with different substrate thicknesses were fabricated. The interference effect of the substrate cavity on the optical voltage response of the detector is analyzed experimentally and theoretically. The experimental results show that the optical response of the detector is determined by the length of the substrate cavity. Thus, the THz devices with different detection frequencies can be designed by changing the substrate cavity length. Furthermore, on the basis of this substrate cavity effect, an asymmetric coupled Fabry-Pérot (FP) cavity is constituted by simply placing a movable metallic planar mirror at the backside of the Si substrate. The incident THz radiation on the Nb5N6 microbolometer can be effectively manipulated by changing the substrate-mirror distance to modulate the phase relation between the reflect wave and the incident wave. The distinct radiation control can be observed, and the experiments can be well explained by numerically analyzing the responsivity dynamics that highlights the role of the FP cavity effect during radiation. All of the results discussed here can be extended to a broad range of frequency and other type of THz detectors.

Effects of Stoichiometric Ratio of NbN Films on the Performance of Hot Electron Bolometer Direct Detection

The Performance of Superconducting NbN Hot Electron Bolometer with Nb5N6 Buffer Layer

The Performance of Suspended Superconducting NbN Hot Electron Bolometer with Buffer Layer

Size Effect on the Performance of Nb5N6 Bolometer for THz Detection

Characterization of thin-film NbN superconductor for single-photon detection by transport measurements

High Performance Ultra-Thin Niobium Films for Superconducting Hot-Electron Devices

The Design of Nb5N6 micro-bolometer for 0.3 THz Detector

Terahertz Detectors Based on Superconducting Hot Electron Bolometers

Terahertz Direct Detectors Based on Superconducting Hot Electron Bolometers with Different Biasing Methods

Relationship Between the Thermoelectric Properties and Infrared Emissivity of Nb-Doped TiO2

Performance Improvements of a Terahertz Direct Detector for Imaging Arrays

The Impact of Flip-chip Process on Nb5N6 Microbolometer Arrays for Terahertz Detection

Fabrication of a strain-induced high performance NbN ultrathin film by a Nb5N6 buffer layer on Si substrate

Thermal-property Optimization Dominated by the Stoichiometric Ratio in W - Si Superconducting Single-Photon Detectors

Thermal-property optimization dominated by the stoichiometric ratio in - superconducting single-photon detectors

Investigation of antenna-coupled Nb5N6 microbolometer THz detector with substrate resonant cavity

Design and Fabrication of Superconducting HEB Mixer

Ultrathin Nbtin Films with High Ti Composition for Superconducting Nanowire Single Photon Detectors

Sputtered NbN Films for Ultrahigh Performance Superconducting Nanowire Single-Photon Detectors

The Effect of Metal Reflector on Responsivity of Nb5N6 THz Detector

Nb 5 N 6 Thin Film on Silicon and Silicon Oxide: A Good Material for Terahertz Detection