The Performance of Superconducting NbN Hot Electron Bolometer with Nb5N6 Buffer Layer

Hongkai Shi,Daogang Sun,Runfeng Su,Tao Xu,Xiaoqing Jia,Lin Kang,Xuecou Tu,Jian Chen,Peiheng Wu
DOI: https://doi.org/10.1109/irmmw-thz50926.2021.9567258
2021-01-01
Abstract:In this paper, the superconducting NbN hot electron bolometer terahertz detector with an Nb5N6 buffer layer was fabricated on the Si substrate. The Nb5N6 buffer layer can significantly improve the superconductivity of ultra-thin NbN films. Preliminary results show that with a 30-nm-thick buffer, the zero resistance superconducting transition temperature of a 6-nm-thick NbN film device is 12.6 K, and the superconducting critical current of the device is increased by four times. The noise temperature, IF bandwidth and direct detection sensitivity of the device will be further characterized in following experiments.
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